An online laser-induced flaw inspection device for optical elements

Shi Yali; Tao Xian; Zhou Xinda; Zhang Jiabin; Ding Lei; Zhang Zhengtao

doi:10.3788/irla201847.0417003

[1] Zhou Gang, Ma Bin, Jiao Hongfei, et al. 1 064 nm high-reflection mirrors[J]. High Power Laser and Particle Beams, 2011, 23(4): 963-968. (in Chinese)

[2] Liu Anping, Duan Lihua, Hu Jianping, et al. Automatic detection of laser damage threshold by scattering light technique[C]//Proceedings of the 6th World Congress on Intelligent Control and Automation, 2006: 5318-5321.

[3] Alan Conder, Terry Alger, Stephen Azevedo, et al. Final optics damage inspection (FODI) for the national ignition facility[J]. Laser-Induced Damage in Optical Materials, 2007, 6720: 1-15.

[4] Xu Longbo, Peng Zhitao, Sun Zhihong, et al. Damage online inspection technology of driver terminal optical elements[J]. Infrared and Laser Engineering, 2009, 38(4):721-724. (in Chinese)

[5] Feng Bo, Liu Bingguo, Chen Fengdong, et al. Final optics damage online inspection system for ICF[J]. Infrared and Laser Engineering, 2013, 42(9): 2519-2524. (in Chinese)

[6] Tao Xian, Zhang Zhengtao, Zhang Feng, et al. Development of detection techniques of surface defects for large aperture optical elements based on machine vision[C]//Proceedings of the 33rd Chinese Control Conference, 2014: 2935-2940.

[7] Benjamin Potsaid, Yves Bellouard, John T. Design of an adaptive scanning optical microscope for simultaneous large field of view and high resolution[C]//Proceedings of the 2005 IEEE International Conference on Robotics and Automation, 2005: 460-465.

[8] Yang Yongying, Lu Chunhua, Liang Jiao, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J]. Acta Optica Sinica, 2013, 42(9): 1031-1038. (in Chinese)

[9] Cheng Xiaofeng, Xu Xu, Zhang Lin, et al. Defect testing of large aperture optics based on high resolution CCD camera[J]. High Power Laser and Particle Beams, 2009, 21(11):1677-1680. (in Chinese)

[10] Xian Tao, Zhengtao Zhang, Feng Zhang, et al. A novel and effective surface flaw inspection instrument for large-aperture optical elements[J]. IEEE Transactions on Instrumentation and Measurement, 2015, 64(9): 2530-2540.

[11] Xiao Bing, Yang Yongying, Gao Xin, et al. Mosaic algorithm for images of detects on surface of large fine optics [J]. Journal of Zhejiang University (Engineering Science), 2011, 45(2): 375-381. (in Chinese)