• Infrared and Laser Engineering
  • Vol. 52, Issue 2, 20220835 (2023)
Feng Song1, Mingjun Chen1, Xuan Chen1, Zejia Zhao1, Xin Liu1, and Jianquan Yao2
Author Affiliations
  • 1School of Physics, Nankai University, Tianjin 300071, China
  • 2College of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
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    DOI: 10.3788/IRLA20220835 Cite this Article
    Feng Song, Mingjun Chen, Xuan Chen, Zejia Zhao, Xin Liu, Jianquan Yao. Review of laser cleaning technology (invited)[J]. Infrared and Laser Engineering, 2023, 52(2): 20220835 Copy Citation Text show less
    Laser wipe: laser lighting to remove ink stains
    Fig. 1. Laser wipe: laser lighting to remove ink stains
    (a) A silicon mask with Al2O3 spherical pollution particles atta-ched; (b) Photo after KrF laser cleaning
    Fig. 2. (a) A silicon mask with Al2O3 spherical pollution particles atta-ched; (b) Photo after KrF laser cleaning
    Diagram of laser cleaning device and mechanism
    Fig. 3. Diagram of laser cleaning device and mechanism
    Schematic diagram of dry (a) and steam (b) laser cleaning device
    Fig. 4. Schematic diagram of dry (a) and steam (b) laser cleaning device
    Laser cleaning mechanism
    Fig. 5. Laser cleaning mechanism
    Ablation mechanism (a) and stripping mechanism (b)
    Fig. 6. Ablation mechanism (a) and stripping mechanism (b)
    Before-and-after cleaning photos of the Hermes sculpture statue
    Fig. 7. Before-and-after cleaning photos of the Hermes sculpture statue
    Laser cleaning of paint on the aluminum alloy substrate
    Fig. 8. Laser cleaning of paint on the aluminum alloy substrate
    Light microscopy; corroded glass, coated with aheteropolysiloxane; on the left side: the coating was removed with 0.5 J/cm2, 10 Hz, 100 pulses, no damage on the natural crack pattern of the gel layer; on the right side: residual coating visible[155]
    Fig. 9. Light microscopy; corroded glass, coated with aheteropolysiloxane; on the left side: the coating was removed with 0.5 J/cm2, 10 Hz, 100 pulses, no damage on the natural crack pattern of the gel layer; on the right side: residual coating visible[155]
    Base materialCategorySpecific research contentLiterature (serial number)
    Stone (marble, limestone, granite)Ancient architecture statue Effects of surface roughness, porosity and water content of mortar [75]Influence of laser parameters and stone cladding color on cleaning efficiency [76-78]Discoloration problem [79-80][68-80]
    MetalworkAncient coins, handicrafts, ornaments, etcCopper roof of Wilanow Palace in Warsaw, Poland[81], fragments of original historic sites in St. Petersburg[82], copper alloy plates on rudders of ancient shipwrecks [83], bronze bells [84], the Paradise Gate of gilded bronze artifacts from the Renaissance in Florence [85]Samuel Morse Statue [86]Coins of the late British Saxon and Norman periods [87], Roman Imperial copper based quaternary alloys [88], Roman and Byzantine coins, and ancient Alexandrian coins [89-91]Fabric embroidered with gold, silver, or copper wire [92-94]. [81-94]
    Wooden relicsStatue ornament The effect of laser wavelength [95-97]The influence of energy density [98]Carve the notched area[99][95-99]
    Oil paintingInfluence of different laser parameters (wavelength, pulse width, repetition rate and energy density) on oil painting surface[100-101]Efficiency and canvas integrity compared with traditional cleaning techniques [102]Study on the mechanism of laser cleaning oil painting [103-104][100-104]
    CelluloseParchment, rice paper, silk, linen and cotton products, etcLaser cleaning of various products [105-110]. "Yellowing" and other discoloration phenomena and solutions[111-113][105-113]
    OtherFossil, glassA sample of fossil mammalian bones [114-115]. Cultural relics such as clay, plaster and wax carving were cleaned [116][114-116]
    Table 1. Examples of laser cleaning cultural relics
    Means of measurementCleaning objectMeasurement result (parameter)Literature (serial number)
    Optical microscope and scanning electron microscopeCopper and copper oxide on circuit boardsThe thickness of the covering layer is reduced from 15-25 nm to ≤ 10 nm[17]
    Atomic force microscopy (AFM), optical and scanning electron microscopyAcrylic ester on Si sheetThe differences in effectiveness and reliability of excimer laser and Si-masters reactive ion cleaning are discussed[19]
    Optical reflection, photoacoustic beam deflection probe laser and flash photography techniquesPollution particles on the NiP disk substrateThe mechanism of wet laser cleaning of contaminated particles on the nip hard disk substrate was studied[27]
    Optical microscopeMetal surface coating materialAblative with TEA CO2 laser pulse [97]
    Optical microscopeStainless steel surfaceγ-Fe2O3 and Fe3O4 formed on the surface of stainless steel are found [125]
    Scanning electron microscopeThe rust of the shipThe corrosion resistance of the laser cleaned surface is about 5 times that of the corroded surface[129]
    Optical microscopeThe oxide layer on Si(100) surfaceComplete pollutant elimination is achieved[167]
    Optical microscopeThe oxide layer on Si(100) surfaceComplete contaminant elimination is achieved without any damage to the surface[168]
    Plume imaging technologyInlaid stone carvingsIt is an inexpensive tool for real-time monitoring of laser ablation and determining safe surface cleaning interventions[174]
    Imaging analysisCarbon steel Q235Improving cleaning efficiency, qualified rate of 92.5%[177]
    Scanning electron microscopePaintThe infrared absorption spectrum of the clean surface has two additional peaks[192]
    Scanning electron microscopeQ345 (Gr·B) steel surface paintThe surface is relatively flat, the content of Fe and C elements reaches 89% and 9% respectively, and the hardness is improved[193]
    Table 2. Commonly used imaging monitoring techniques
    Means of measuremenCleaning objectMeasurement result (parameter)Literature (serial number)
    X-ray electron spectroscopyCopper and copper oxide on circuit boardsThe thickness of the covering layer is reduced from 15-25 nm to ≤ 10 nm[17]
    Laser induced breakdown spectrumAncient Pentelic marble covered with a black crustSelect the best laser parameters for effective cleaning[46]
    X-ray fluorescence analyzerHistorical site surface pollutants and natural sedimentsX-ray fluorescence analyzer can be used to monitor the quality of laser cleaning of historic sites[58]
    X-ray powder diffraction, pyrolytic-gas chromatography-mass spectrometry, portable X-ray fluorescence spectroscopyCity statueDegradation products affecting its surface and organic coatings for protection were analyzed[62]
    Laser induced fluorescence, laser induced breakdown spectrum, Fourier transform Raman spectrum and infrared spectrumColoured wooden ceilingThe influence of laser wavelength is studied[72]
    Laser induced fluorescence spectroscopy, laser induced plasma spectroscopyFine biocomposites such as 15th-and 16th-century parchment manuscripts and 19th-century printing paperThe feasibility of the two technologies in the field of non-destructive on-line monitoring is studied[81]
    Energy dispersive X-ray analysisMetal surface coating materialAblative with TEA CO2 laser pulse [97]
    Energy dispersive X-ray analysisTwo Malaysian car coatingsThe balance of carbon and oxygen components in the cleaning process helps to reduce the coating[105]
    Auger electron spectroscopyStainless steel surfaceγ-Fe2O3 and Fe3O4 formed on the surface of stainless steel are found [125]
    Glow Discharge Emission Spectra (GDOES) and X-ray Photoelectron Spectroscopy (XPS)AA7024-T4 aluminum alloyThe change of material properties is related to the change of surface oxide state[127]
    Raman spectral analysisMarine metalThe relationship between laser power output and Raman spectrum is established[128]
    X-ray photoelectron spectroscopy and scanning electron microscopyThe rust of the shipThe corrosion resistance of the laser cleaned surface is about 5 times that of the corroded surface[129]
    Auger electron spectroscopy (AES), low energy electron diffraction spectroscopy (LEED), X-ray photoelectron spectroscopy (XPS)The oxide layer on Si(100) surfaceComplete pollutant elimination is achieved[167]
    Auger electron spectroscopy (AES)The oxide layer on Si(100) surfaceComplete contaminant elimination is achieved without any damage to the surface[168]
    Laser induced breakdown spectrumInlaid stone carvingsIt is an inexpensive tool for real-time monitoring of laser ablation and determining safe surface cleaning interventions[174]
    Fiber Optic Reflection Spectroscopy (FORS) and Visible and Near Infrared (VNIR) Hyperspectral Imaging (HSI)Limestone surfaceAssess protection status and determine more appropriate cleaning recovery levels[175]
    Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopyPaintThe infrared absorption spectrum of the clean surface has two additional peaks[192]
    Electron backscatter diffractionQ345 (Gr·B) steel surface paintAfter cleaning, the surface is relatively flat, the content of Fe and C elements reaches 89% and 9% respectively, and the hardness is improved.[193]
    Table 3. Common spectral monitoring techniques
    Means of measurementCleaning objectMeasurement result (parameter)Literature (serial number)
    Real-time reflectance measurementOxide on Ge crystal sheetThe energy density cleaning threshold and damage threshold of 193 nm cleaning c-Ge sheet were determined[16]
    Acoustic monitoringContaminated limestone sculptureAcoustic monitoring can judge the cleaning effect in real time[44]
    Surface roughness and surface morphologyPolyurethane coating for hull plate surfaceLaser cleaning has a remarkable effect on the removal of polyurethane paint from ship shell factory[104]
    Surface bonding strengthResin residue on the surface of CFRP materialsThe bonding strength is 1.6 times that of the surface without laser cleaning[116]
    Continuous measurement of surface photocurrentPure tungsten photocathodeReal-time monitoring of cleaning effect[159]
    Surface roughnessMetalA two-stage process parameter adjustment and surface roughness estimation algorithm based on image analysis was proposed[176]
    Table 4. Surface information monitoring technology
    OrganizationLaserWavelength/ nm Cleaning objectBasePollutantLiterature (serial number)
    Nankai UniversityNd:YAG laser150Homemade sampleAluminium alloyPaint[229]
    Harbin Institute of TechnologyNanosecond fiber pulse laser30-100Homemade sampleTitanium alloyOxide layer[230]
    Huazhong University of Science and TechnologyPulse laser with maximum Power of 100 W (YDFLP-100-LM1)100Homemade sampleAluminium alloyOxide layer[231]
    Jiangsu UniversityIPG-HP-100 laser100Homemade sampleSteelOxide[232]
    Jinan UniversityAll solid state fiber coupled output laser50Aluminium alloy tyre mouldAluminium alloySulfide[233]
    Hunan Engineering and Technology Research Center of Aircraft MaintenanceAll-solid state quasi-continuous laser (IS-0604QCW)100Homemade sampleAluminium alloyPaint layer[234]
    Table 5. Research on laser cleaning in some domestic units
    LaserTypeWavelength/nmCleaning contaminantLiterature (serial number)
    Excimer laserArF, KrF193, 248Granules and paints[235]
    Nd:YAG laserNd:YAG352, 532, 1 064Metal contaminant[236]
    Er:YAG laserEr:YAG2 940Pollutant cleaning of cultural relics[89]
    Fiber laserFiber laser1 064Paint, rust[237]
    Gas laserCO2 laser 1 0.6Paint on non-metallic materials[238]
    Table 6. Mainly used lasers and contaminants
    Feng Song, Mingjun Chen, Xuan Chen, Zejia Zhao, Xin Liu, Jianquan Yao. Review of laser cleaning technology (invited)[J]. Infrared and Laser Engineering, 2023, 52(2): 20220835
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