• Opto-Electronic Engineering
  • Vol. 36, Issue 10, 30 (2009)
MA Jie1、*, CAO Lei-feng2, XIE Chang-qing1, WU Xuan1, LI Hai-liang1, ZHU Xiao-li1, LIU Ming1, CHEN Bao-qin1, and YE Tian-chun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2009.10.006 Cite this Article
    MA Jie, CAO Lei-feng, XIE Chang-qing, WU Xuan, LI Hai-liang, ZHU Xiao-li, LIU Ming, CHEN Bao-qin, YE Tian-chun. Fabrication of High Aspect-ratio Hard X-Ray Zone Plates with Supporting Structures[J]. Opto-Electronic Engineering, 2009, 36(10): 30 Copy Citation Text show less
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    [5] CHEN Yu-Tung,LO Tsung-Nan,CHU Yong S, et al. Full-field hard x-ray microscopy below 30 nm:a challenging nanofabrication achievement [J]. Nanotechnology(S0957-4484),2008,19:395302.

    [6] ALTISSIMO Matteo,ROMANATO Filippo,VACCARI Lisa , et al. X-ray lithography fabrication of a zone plate for X-rays in the range from 15 to 30 keV [J]. Microelectronic Engineering(S0167-9317),2002,61/62:173-177.

    [7] LIU Ying,FU Shao-jun. Preliminary study on Soft X Ray Phase Zone Plates [J]. ACTA PHOTONICA SINICA,2002,31(s2):332-334.

    [8] XIAO Kai,LIU Ying,XU Xiang-dong,et al. Fabrication of Soft X-Ray Phase Condenser Zone Plates [J]. ACTA OPTICA SINICA,2005,25(12):1722-1723.

    [9] XIAO Kai,LIU Ying,CHEN Liang,et al. Characterization of Relative Diffraction Performance of Soft X-Ray Zone Plates by Experiment [J]. ACTA OPTICA SINICA,2006,26(10):1598-1600.

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    [11] WANG De-qiang,CAO Lei-feng,XIE Chang-qing,et al. Microzone plates with high-aspect ratio fabricated by e-beam and x-ray lithography [J]. J. Microlith, Microfab, Microsyst(S1537-1646),2006,5(1):013002.

    [12] WANG De-qiang,KANG Xiao-hui,XIE Chang-qing,et al. Study on Image Datum for High Resolution Zone Plates Fabricated by E-beam [J]. Microfabrication Technology,2005(2):28-33.

    [13] OLYNICK Deirdre L,HARTENECK Bruce D,VEKLEROV Eugene, et al. 25 nm mechanically buttressed high aspect ratio zone plates:Fabrication and performance [J]. J. Vac. Sci. Technol. B(S1071-1023),2004,22(6):3186-3190.

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    MA Jie, CAO Lei-feng, XIE Chang-qing, WU Xuan, LI Hai-liang, ZHU Xiao-li, LIU Ming, CHEN Bao-qin, YE Tian-chun. Fabrication of High Aspect-ratio Hard X-Ray Zone Plates with Supporting Structures[J]. Opto-Electronic Engineering, 2009, 36(10): 30
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