Juan Wang, Lina Ji, Yun Bai, Zuohua Huang. Study on Measurement of Optical Parameters of Anisotropic Crystal by Single Wavelength Ellipsometry[J]. Laser & Optoelectronics Progress, 2020, 57(15): 152401
- Laser & Optoelectronics Progress
- Vol. 57, Issue 15, 152401 (2020)
Fig. 1. Polarized light reflection on the crystal surface
Fig. 2. Flow chart of improved simulated annealing simplex joint algorithm
Fig. 3. Variation of ellipsometric parameters of quartz crystal with incident angle. (a) Ψ; (b) Δ
Fig. 4. Variation of ellipsometric parameters of calcite crystal with incident angle. (a) Ψ; (b) Δ
Fig. 5. Variation of ellipsometric parameters of quartz crystal with optical axis azimuth angle. (a) Ψ; (b) Δ
Fig. 6. Variation of ellipsometric parameters of calcite crystal with optical axis azimuth angle. (a) Ψ; (b) Δ
Fig. 7. Relationship between standard deviation of crystal optical parameters and rotation angle. (a) quartz crystal; (b) calcite crystal
Fig. 8. Relation between the angular position error and the optical axis azimuth angle of crystal. (a) quartz crystal; (b) calcite crystal
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Table 1. Inversion data of quartz crystal
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Table 2. Inversion data of calcite crystal
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Table 3. Repeated measurement results of ellipsometric parameters of crystalunit: (°)
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Table 4. Inversion results of crystal optical parameters
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Table 5. Quartz crystal measurement results of multiple experiments
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Table 6. Calcite crystal measurement results of multiple experiments
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