• Laser & Optoelectronics Progress
  • Vol. 50, Issue 5, 51402 (2013)
Liu Yang1、2、*, Yu Jin1, Zhang Xue1, Mo Zeqiang1、2, Nie Shuzhen1, Huang Yutao1, Fan Zhongwei1、3, and Chen Bo4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.3788/lop50.051402 Cite this Article Set citation alerts
    Liu Yang, Yu Jin, Zhang Xue, Mo Zeqiang, Nie Shuzhen, Huang Yutao, Fan Zhongwei, Chen Bo. Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System[J]. Laser & Optoelectronics Progress, 2013, 50(5): 51402 Copy Citation Text show less
    References

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    [2] Ma Yufeng, Yu Jin, Niu Gang et al.. 25 W high repetition rate picoseconds green laser[J]. Chinese J. Lasers, 2011, 38(12): 1202010

    [3] G. Dumitru, V. Romano, H. P. Weber. Femtosecond ablation of ultrahard materials[J]. Appl. Phys. A, 2002, 74(6): 729~739

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    [5] Zhao Gang, Hao Qiulong, Qi Wenzong et al.. Thermal behavior of thin metal films irradiated by ultra-short pulse laser[J]. Acta Photonica Sinica, 2007, 36(1): 9~12

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    [7] F. Dausinger, H. Hügel, V. Konov. Micromachining with ultrashort laser pulses: from basic understanding to technical applications[C]. SPIE, 2003, 5147: 106~115

    [8] Xiong Zhimin, Zhang Panzheng, Fan Wei et al.. Heat affection of picosecond laser irradiation with different widths on the dielectric film damage ablation[J]. Chinese J. Lasers, 2012, 39(8): 0803005

    [9] Sun Xiaohun, Zhou Changhe. Fabrication of microoptical elements with femtosecond laser[J]. Chinese J. Lasers, 2006, 33(1): 133~137

    [10] Li Ping, Wang Yu, Feng Guojin et al.. Study of silicon micro-structuring using ultra-short laser pulses[J]. Chinese J. Lasers, 2006, 33(12): 1688~1691

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    [15] Satoshi Kawata, Sun Hongbo, Tomokazu Tanaka et al.. Finer features for functional microdevices[J]. Nature, 2001, 412(6848): 697~698

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    Liu Yang, Yu Jin, Zhang Xue, Mo Zeqiang, Nie Shuzhen, Huang Yutao, Fan Zhongwei, Chen Bo. Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System[J]. Laser & Optoelectronics Progress, 2013, 50(5): 51402
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