Batch production technology of 50 mm&#215;50 mm HgCdTe LPE materials with high performance

SUN Quan-Zhi; SUN Rui-Yun; WEI Yan-Feng; SUN Shi-Wen; ZHOU Chang-He; XU Chao; YU Hui-Xian; YANG Jian-Rong

doi:10.11972/j.issn.1001-9014.2017.01.010

[1] Rogalski A. Recent progress in infrared detector technologies［J］. Infrared Physics and Technology, 2011, 54: 136-154.

[3] Reibel Y, Rouvie A, Nedelcu A, et al. Large format, small pixel pitch and hot detectors at SOFRADIR［J］. Proc. of SPIE, 2013, 8896: 88960B-1-11.

[4] Hanold B J, Figer D F, Lee J, et al. Large format MBE HgCdTe on silicon detector development for astronomy［J］. Proc. of SPIE, 2015, 9609: 96090Y-1-15.

[5] Becker L. Current and future trends in infrared focal plane array technology［J］. Proc. of SPIE, 2005, 5881:588105-1-15.

[6] Gravrand O, Destefanis G, Bisotto S, et al. Issues in HgCdTe research and expected progress in infrared detector fabrication［J］. Journal of Electronic Materials, 2013, 42(11): 3349-3358.

[7] Castelein P, Baier N, Gravrand O, et al. Latest developments on p-on-n HgCdTe architectures at DEFIR［J］. Proc. of SPIE, 2014, 9070: 90702Y-1-14.

[8] Wenisch J, Bitterlich H, Bruder M, et al. Large-format and long-wavelength infrared mercury cadmium telluride detectors［J］. Journal of Electronic Materials, 2013, 42(11): 3186-3190.

[12] Sheng F F, Yang J R, Sun S W, et al. Influence of Cd-rich annealing on defects in Te-rich CdZnTe materials［J］. Journal of Electronic Materials, 2014, 43(7): 2702-2708.

[14] Tobin S P, Smith F T J, Norton P W, et al. The relationship between lattice matching and crosshatch in liquid phase epitaxy HgCdTe on CdZnTe substrates［J］. Journal of Electronic Materials, 1995, 24(9): 1189-1199.

[15] Rhiger D R, Sen S, Peterson J M, et al. Lattice mismatch induced morphological features and strain in HgCdTe epilayers on CdZnTe substrates［J］. Journal of Electronic Materials, 1997, 26(6): 515-523.