• Journal of Infrared and Millimeter Waves
  • Vol. 36, Issue 1, 49 (2017)
SUN Quan-Zhi1、2、*, SUN Rui-Yun1, WEI Yan-Feng1, SUN Shi-Wen1, ZHOU Chang-He1、2, XU Chao1、2, YU Hui-Xian1, and YANG Jian-Rong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2017.01.010 Cite this Article
    SUN Quan-Zhi, SUN Rui-Yun, WEI Yan-Feng, SUN Shi-Wen, ZHOU Chang-He, XU Chao, YU Hui-Xian, YANG Jian-Rong. Batch production technology of 50 mm×50 mm HgCdTe LPE materials with high performance[J]. Journal of Infrared and Millimeter Waves, 2017, 36(1): 49 Copy Citation Text show less

    Abstract

    High performance Hg1-xCdxTe epitaxial materials with the size of 50 mm×50 mm were produced by Te-rich vertical LPE technology. The sample holder with triangle cylinder structure and a function to prevent HgCdTe solution soaking into the back of the substrates was designed and used to obtain 3 epitaxial materials for each growth process. In order to obtain uniform epilayers, the temperature uniformity and composition uniformity of HgCdTe solution during the process were improved. The STDDEVs for x-value and thickness distributions of 50 mm×50 mm epitaxial material are 0.000 4 and 0.4 μm, respectively. The average values of x-value and thickness of three epitaxial wafers grown at the same time have a very small difference, less than 0.0004 and 0.1 μm, respectively. The differences of average x-values and thickness values from run-to-run are about ±0.002 and ±2 μm, respectively. In order to control the defects of HgCdTe epilayers, the lattice parameters and defects of CdZnTe substrates have been strictly controlled. The full width at half maximum (FWHM) of X-ray double-crystal rocking curve for HgCdTe epilayers was controlled within 30″. The dislocation density is less than 1×105 cm-2, and the surface defect density is less than 5 cm-2. Utilizing annealing technique, the carrier concentration of Hg vacancy doped p-type Hg0.78Cd0.22Te epilayers at 77 K were controlled in a range of 8 ~ 20×1015 cm-3 and their hole mobility exceed 600 cm2/Vs. The material performance and production capacity based on the LPE technique described above can satisfy the demand for fabricating large format HgCdTe infrared focal plane arrays.
    SUN Quan-Zhi, SUN Rui-Yun, WEI Yan-Feng, SUN Shi-Wen, ZHOU Chang-He, XU Chao, YU Hui-Xian, YANG Jian-Rong. Batch production technology of 50 mm×50 mm HgCdTe LPE materials with high performance[J]. Journal of Infrared and Millimeter Waves, 2017, 36(1): 49
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