• Optics and Precision Engineering
  • Vol. 31, Issue 4, 442 (2023)
Qianghui LUO1,2, Wei MIAO1,*, Feiming LI1,2, Jiaqiang ZHONG1..., Zheng WANG1, Jiangqiao DING1,3, Kangmin ZHOU1, Wen ZHANG1, Yuan REN1 and Shengcai SHI1,*|Show fewer author(s)
Author Affiliations
  • 1Purple Mountain Observatory, Chinese Academy of Sciences, Nanjing20023, China
  • 2University of Science and Technology of China, Hefei3006, China
  • 3Nanjing University of Information Science and Technology, Nanjing210044, China
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    DOI: 10.37188/OPE.20233104.0442 Cite this Article
    Qianghui LUO, Wei MIAO, Feiming LI, Jiaqiang ZHONG, Zheng WANG, Jiangqiao DING, Kangmin ZHOU, Wen ZHANG, Yuan REN, Shengcai SHI. Development of a 220 GHz Ti superconducting TES detector array for CMB polarization experiment[J]. Optics and Precision Engineering, 2023, 31(4): 442 Copy Citation Text show less

    Abstract

    High-sensitivity superconducting transition edge sensor (TES) detectors have significant application prospects in the detection of the B-mode polarization of cosmic microwave background (CMB). In this study, we developed a 220 GHz antenna-coupled titanium (Ti) superconducting TES detector array (8×8) using a leg supporting structure. Before the supporting legs were fabricated, we measured the thermal conductance and the noise equivalent power (NEP) of the Ti superconducting TES detector. The measurement results show that the thermal conductance of the Ti superconducting TES detector, primarily determined by the electron-phonon interaction in the superconducting Ti microbridge, is approximately 485.4 pW/K. Moreover, the NEP of the Ti superconducting TES detector is approximately 5×10-17 W/Hz0.5. In principle, the thermal conductance of the Ti superconducting TES detector can be further reduced after its supporting legs are fabricated, which is approximately 38 pW/K. Meanwhile, the thermal fluctuation noise of the detector after its supporting legs are fabricated is approximately 9.2×10-18 W/Hz0.5. Thus, the noise performance can be further improved.
    Qianghui LUO, Wei MIAO, Feiming LI, Jiaqiang ZHONG, Zheng WANG, Jiangqiao DING, Kangmin ZHOU, Wen ZHANG, Yuan REN, Shengcai SHI. Development of a 220 GHz Ti superconducting TES detector array for CMB polarization experiment[J]. Optics and Precision Engineering, 2023, 31(4): 442
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