A Method to Polish Glassceramic Components with Complex Internal Structure

JIAO Ling-yan; LIU Jie; HUI Chang-shun; JIN Yu-zhu; DING Xiang-dong

doi:10.3969/j.issn.1003-501x.2011.12.016

Journals >Opto-Electronic Engineering >Volume 38 >Issue 12 >Page 85 > Article

Opto-Electronic Engineering
Vol. 38, Issue 12, 85 (2011)

A Method to Polish Glassceramic Components with Complex Internal Structure

JIAO Ling-yan^1、*, LIU Jie², HUI Chang-shun¹, JIN Yu-zhu¹, and DING Xiang-dong¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

DOI: 10.3969/j.issn.1003-501x.2011.12.016 Cite this Article

JIAO Ling-yan, LIU Jie, HUI Chang-shun, JIN Yu-zhu, DING Xiang-dong. A Method to Polish Glassceramic Components with Complex Internal Structure[J]. Opto-Electronic Engineering, 2011, 38(12): 85 Copy Citation Text

show less

References

[4] STILLMANA J, JUDY J, HELVJIAN H. Aspect Ratios, Size, and Etch Rate in Photo structurable Glass-ceramic [J]. Proc. of SPIE(S0277-786X), 2008, 6882: 68820J-1-68820J-11.

[5] MCCREEDY T. Rapid Prototyping of glass and PDMS micro-structures for micro total an alytical systems and micro-chemical reactors by microfabrication in the general Iabo-ratory [J]. Analytica Chemica Acta, 2001, 427: 39-43.

[9] LIVINGSTON F E, ADAMS P M, HELVJIAN H. Examination of The Laser-induced Variations in The Chemical Etch Rate of a Photosensitive Glass-ceramic [J]. Applied Physics A: Materials Science & Processing(S0947-8396), 2007, 89: 97-107.

[10] STILLMAN J A, JUDY J W, HELVJIAN H. Processing Parameters for The Development of Glass-ceramic MEMS [J]. Proc. of SPIE(S0277-786X), 2007, 6462: 64620A-1-64620A-09.

JIAO Ling-yan, LIU Jie, HUI Chang-shun, JIN Yu-zhu, DING Xiang-dong. A Method to Polish Glassceramic Components with Complex Internal Structure[J]. Opto-Electronic Engineering, 2011, 38(12): 85

Download Citation

Tools

Save the article for my favorites

Paper Information