• Journal of Infrared and Millimeter Waves
  • Vol. 33, Issue 4, 333 (2014)
WANG Yun-Ji1、2、3, TANG Heng-Jing1、2, LI Xue1、2, SHAO Xiu-Mei1、2, YANG Bo1、2, DENG Shuang-Yan1、2, and GONG Hai-Mei1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3724/sp.j.1010.2014.00333 Cite this Article
    WANG Yun-Ji, TANG Heng-Jing, LI Xue, SHAO Xiu-Mei, YANG Bo, DENG Shuang-Yan, GONG Hai-Mei. Performance of InGaAs detector with SiN diffusion mask[J]. Journal of Infrared and Millimeter Waves, 2014, 33(4): 333 Copy Citation Text show less
    References

    [1] Rouvie A, Huet Q. SWIR InGaAs focal plane arrays in France[J]. Proc.SPIE, 2013, 8704: 870403.

    [2] Cohen M J, Olsen G H. Room temperature camera for NIR imaging[J]. Proc. SPIE,1993,1946: 436-443.

    [3] Li Y F, Tang H J, Li T,et al. Suppression of extension of the photo-sensitive area for a planar-type front-illuminated InGaAs detector by the LBIC technique[J], J. Semicond, 2010, 31(1): 01300215.

    [4] Joshi A M, Ban V S, Mason S,et al. 512 and 1024 element linear InGaAs detector arrays for near infrared (1~3μm) environmental sensing [J], Proc SPIE, 1992, 1735: 287.

    [5] Kozlowski L J, Tennant WE, Zandian M, et al. SWIR staring FPA performance at room temperature[J], Proc SPIE,1996, 2746: 93.

    [6] Hoogeveen R W M, van der Ronald J A, Goede A P H. Extended wavelength In GaAs infrared(1.0~2.0μm) detector arrays on SCIAMACHY for space-based spectrometry of the Earth atmosphere[J], Infrared Physics & Technology, 2001, 42: 1

    [7] Yuan Y, Meixell M. Low dark current small pixel large format InGaAs 2D photodetector array development at Teledyne Judson technologies[J]. Proc. SPIE, 2012, 8353: 835309.

    [8] Onat B M, Huang W, Masaun N,et al. Ultra low dark current InGaAs technology for focal plane arrays for low-light level visible-shortwave infrared imaging[J]. Proc. SPIE, 2007, 6542: 65420L.

    WANG Yun-Ji, TANG Heng-Jing, LI Xue, SHAO Xiu-Mei, YANG Bo, DENG Shuang-Yan, GONG Hai-Mei. Performance of InGaAs detector with SiN diffusion mask[J]. Journal of Infrared and Millimeter Waves, 2014, 33(4): 333
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