• Opto-Electronic Engineering
  • Vol. 36, Issue 2, 29 (2009)
XU Jun-qi* and FENG Xiao-li
Author Affiliations
  • [in Chinese]
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    DOI: Cite this Article
    XU Jun-qi, FENG Xiao-li. Optical Constants of Multi-layer Thin Films Investigated by Spectroscopic Ellipsometry[J]. Opto-Electronic Engineering, 2009, 36(2): 29 Copy Citation Text show less
    References

    [1] CHEN Yan-ping,YU Fei-hong. Test methods for film thickness and optical constants [J]. Optical Instruments,2006,28(6):84-88.

    [2] Ferrieu F,Dabertrand K,Lhostis S,et al. Observation of HfO2 thin films by deep UV spectroscopic ellipsometry [J]. Journal of Non-Crystalline Solids(S0022-3093),2007,353(5/7):658-662.

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    [4] Hinrichs K,R seler A,Gensch M,et al. Structure analysis of organic films by mid-infrared ellipsometry [J]. Thin Solid Films(S0040-6090),2004,455/456:266-271.

    [5] Liu Y C,Hsieh J H,Tung S K. Extraction of optical constants of zinc oxide thin films by ellipsometry with various models [J]. Thin Solid Films(S0040-6090),2006,510(1/2):32-38.

    [6] YU Ping,ZHANG Jin-min. The principle and application of ellipsometery [J]. Journal of Hefei University:Natural Sciences Edition,2007,17(1):87-89.

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    [8] LIU Wei,SU Xiao-ping,ZHANG Shu-yu,et al. Growth and characterization of HfO2 thin films [J]. Chinese Journal of Vacuum Science and Technology,2008,28(2):159-163.

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    CLP Journals

    [1] Song Guozhi, Liu Tao, Chen Yaqin, Li Guoguang, Wang Jiandong. Calibration of Spectroscopic Ellipsometer Using Multiple Standard Samples[J]. Acta Optica Sinica, 2014, 34(3): 312003

    [2] WU Huili, TANG Yi, BAI Tingzhu, JIANG Yurong, JIANG Jing. Measurement of Optical Constants for UV Coating Based on Multilayer Film Model by Spectroscopic Ellipsometry[J]. Opto-Electronic Engineering, 2015, 42(9): 89

    XU Jun-qi, FENG Xiao-li. Optical Constants of Multi-layer Thin Films Investigated by Spectroscopic Ellipsometry[J]. Opto-Electronic Engineering, 2009, 36(2): 29
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