Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma

SONG Zhi-jie; XU Hao-jun; WEI Xiao-long; CHEN Zeng-hui; SONG Fei-long; ZHANG Wen-yuan

doi:10.3964/j.issn.1000-0593(2019)04-1242-05

Journals >Spectroscopy and Spectral Analysis >Volume 39 >Issue 4 >Page 1242 > Article

Spectroscopy and Spectral Analysis
Vol. 39, Issue 4, 1242 (2019)

Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma

SONG Zhi-jie, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, and ZHANG Wen-yuan

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[in Chinese]

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DOI: 10.3964/j.issn.1000-0593(2019)04-1242-05 Cite this Article

SONG Zhi-jie, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, ZHANG Wen-yuan. Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma[J]. Spectroscopy and Spectral Analysis, 2019, 39(4): 1242 Copy Citation Text

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References

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