Cheng Yong, Lu Yimin, Guo Yanlong, Huang Guojun, Wang Shuyun, Liu Xu, Cao Haiyuan, Chu Hua, Yang Xue. Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate[J]. Infrared and Laser Engineering, 2016, 45(6): 621004

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- Infrared and Laser Engineering
- Vol. 45, Issue 6, 621004 (2016)
Abstract

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