• Spectroscopy and Spectral Analysis
  • Vol. 42, Issue 9, 2752 (2022)
Ming-bo LIU1、*, Lei ZHAO1、1; 2;, Xue-qiang HU2、2;, Zi-yue NI1、1; 2;, Li-xia YANG1、1; 2;, Yun-hai JIA1、1; 2;, and Hai-zhou WANG1、1; 2; *;
Author Affiliations
  • 11. Central Iron and Steel Research Institute, Beijing 100081, China
  • 22. NCS Testing Technology Co., Ltd., Beijing 100081, China
  • show less
    DOI: 10.3964/j.issn.1000-0593(2022)09-2752-05 Cite this Article
    Ming-bo LIU, Lei ZHAO, Xue-qiang HU, Zi-yue NI, Li-xia YANG, Yun-hai JIA, Hai-zhou WANG. Design of High-Throughput μ-EDXRF[J]. Spectroscopy and Spectral Analysis, 2022, 42(9): 2752 Copy Citation Text show less
    (a) Layout of NX-mapping; (b) Prototype of NX-mapping
    Fig. 1. (a) Layout of NX-mapping; (b) Prototype of NX-mapping
    Layout of knife-edge experiment
    Fig. 2. Layout of knife-edge experiment
    Mapping of Fe and Ni in X-Z knife-edge scanning of Fe-Ni film
    Fig. 3. Mapping of Fe and Ni in X-Z knife-edge scanning of Fe-Ni film
    Calculation of effective focalspot size of Fe by knife-edge experiment
    Fig. 4. Calculation of effective focalspot size of Fe by knife-edge experiment
    Trend of effective focalspot size of Fe and Ni with sample height
    Fig. 5. Trend of effective focalspot size of Fe and Ni with sample height
    Mapping of Ni/Ta/W/Re intensity in a single crystal supper alloy
    Fig. 6. Mapping of Ni/Ta/W/Re intensity in a single crystal supper alloy
    特征线/cps平均值(I)实测RSD/%理论RSD/%
    Ti∶Ka1 7567.21.051.07
    Fe∶Ka71.716.4116.70
    Co∶Ka40.724.0922.18
    Ni∶Ka55.119.8819.05
    Cu∶Ka37.925.3522.97
    Table 1. Static test of 400 times with one detector of 25 mm2, 40 kV/600 μA/0.5 s(T)
    特征线/cps平均值(I)实测RSD/%理论RSD/%
    Ti∶Ka5 3513.80.630.61
    Fe∶Ka223.810.169.45
    Co∶Ka123.914.7312.65
    Ni∶Ka163.312.9311.07
    Cu∶Ka113.214.7713.29
    Table 2. Static test of 400 times with 3 detector of 25 mm2 each, 40 kV/600 μA/0.5 s(T)
    特征线/cps平均值(I)实测RSD/%理论RSD/%
    Ti∶Ka134 535.10.370.39
    Fe∶Ka538.57.076.09
    Co∶Ka295.210.978.23
    Ni∶Ka362.79.617.43
    Cu∶Ka240.512.519.12
    Table 3. Static test of 400 times with 6 detectors (4×25 mm2+2×50 mm2), 40 kV/600 μA/0.5 s(T)
    特征线/cps平均值(I)实测RSD/%理论RSD/%
    Cr∶Ka74 193.25.065.19
    Fe∶Ka181 819.03.063.32
    Ni∶Ka11 230.013.3013.34
    Table 4. Static still test of 400 times, 5 ms(T) each
    特征线/cps平均值(I)实测RSD/%理论RSD/%
    Cr∶Ka74 482.45.045.18
    Fe∶Ka182 682.33.083.31
    Ni∶Ka11 257.813.2313.33
    Table 5. Scanning test of 2 mm×2 mm(20×20 pixels), 5 ms(T) each, speed with 20 mm·s-1
    Ming-bo LIU, Lei ZHAO, Xue-qiang HU, Zi-yue NI, Li-xia YANG, Yun-hai JIA, Hai-zhou WANG. Design of High-Throughput μ-EDXRF[J]. Spectroscopy and Spectral Analysis, 2022, 42(9): 2752
    Download Citation