[1] Mao Heng, Tao Louis, Chen Liangyi. Application and development of adaptive optics to three-dimensional in vivo deep tissue fluorescent microscopy[J]. Infrared and Laser Engineering, 2016, 45(6): 0602001. (in Chinese)
[2] Zhou Xiaoqin, Hou Qiang, Liu Qiang, et al. Research status and tendency of measurement techniques for geometric features of micro/nano structures[J]. Journal of Beijing University of Technology, 2015, 41(3): 327-339. (in Chinese)
[3] Qiu Lirong, Zhao Weiqian, Wang Xu, et al. Error analysis for a laser differential confocal radius measurement system[J]. Applied Optics, 2015, 54(5): 1078-84.
[4] Cui Jianjun. Lateral resolution test for confocal laser scanning microscope[J]. Key Engineering Materials, 2014, 609-610(11): 1159-1164.
[5] Giusca C L, Leach R K. Calibration of the Metrological Characteristics of Imaging Confocal Microscopes (ICMs)[M]. Britain: National Physical Laboratroy, 2012: 17-62.
[6] Beraldin J A, Mackinnon D, Cournoyer L. Metrological characterization of 3D imaging systems: progress report on standards developments[J]. Anatomical Record, 2015, 151(2): 107-117.
[7] Liu Jian, Li Mengzhou, Li Qiang, et al. Decoupling criterion based on limited energy loss condition for groove measurement using optical scanning microscopes[J]. Measurement Science & Technology, 2016, 27(12): 125014.
[8] Liu Jian, Gu Kang, Li Mengzhou, et al. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 0302001. (in Chinese)
[9] Li Yao, Yang Yongying, Wang Chen, et al. Point diffraction in terference detection technology[J]. Chinese Optics, 2017,10(4): 391-414. (in Chinese)
[10] Cole R W, Jinadasa T, Brown C M. Measuring and interpreting point spread functions to determine confocal microscope resolution and ensure quality control[J]. Nature Protocols, 2011, 6(12): 1929-1941.
[12] Yu Qing, Yu Xiaofen, Cui Changcai, et al. Survey of parallel light source technology in parallel confocal measurement[J]. Chinese Optics, 2013, 6(5): 652-659. (in Chinese)
[13] Zeiss M F C. Confocal laser scanning microscopy[J]. Journal of Microscopy, 1995, 178(3): 261-266.
[14] Cui Jianjun, Gao Sitian. Nanometer film thickness metrology and traceability based on grazing incidence X-ray reflectometry[J]. Acta Physica Sinica, 2014, 63(6): 060601.(in Chinese)
[15] Cui Jianjun. Study on metrological traceability through fabry-perot laser interferometer or atomic lattice spacing for micro displacement measurement[D]. Tianjin: Tianjin University, 2014. (in Chinese)
[16] Zhang Mingkai, Gao Sitian, Lu Rongsheng, et al. Ultraviolet scanning linewidth measuring system[J]. Infrared and Laser Engineering, 2015, 44(2): 625-631. (in Chinese)