• Chinese Journal of Lasers
  • Vol. 31, Issue 3, 363 (2004)
[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Computer-Controlled Temperature Measurement System for the Small Exposed Region in Laser Assisted Microprocessing[J]. Chinese Journal of Lasers, 2004, 31(3): 363 Copy Citation Text show less
    References

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    [5] D. J. Ehrlich, J. Y. Tsao. Submicrometer-linewidth doping and relief definition in silicon by laser-controlled diffusion [J]. Appl. Phys. Lett.,1982, 41(3):297~299

    [6] P. Baumgartner, W. Wegscheider, M. Bichler et al.. Single-electron transistor fabricated by focused laser beam-induced doping of a GaAs/AlGaAs heterostructure [J]. Appl. Phys. Lett., 1997, 70(16):2135~2137

    [7] Daniel Guidotti, John G. Wilman. Novel and nonintrusive optical thermometer [J]. Appl. Phys. Lett., 1992, 60(5):524~526

    [8] B. Stritzker, A. Pospieszczyk, J. A. Tagle. Measurement of lattice temperature of silicon during pulsed laser annealing [J]. Phys. Rev. Lett., 1981, 47(5):356~358

    [10] M. Lax. Temperature rise induced by a laser beam [J]. J. Appl. Phys., 1977, 48(9):3919~3924

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Computer-Controlled Temperature Measurement System for the Small Exposed Region in Laser Assisted Microprocessing[J]. Chinese Journal of Lasers, 2004, 31(3): 363
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