In laser assisted microprocessing, the temperature distribution in the small exposed region is the main parameter. The temperature distribution should not be influenced by the measurement. Therefore the remote sensing of the temperature distribution in the small exposed region is needed. So a computer-controlled temperature measurement system has been developed. The system can realize the real time temperature measurement of the small laser-exposed region nonintrusively. In the system, a InGaAs/InP photodiode converts the radiation from the small high temperature region into photocurrent. Then the photocurrent is amplified, and converted into digital data. Combining with calibration experiment, the computer calculates the temperature through interpolation. The system can reach a temperature resolution of 0.2 ℃. The measurement region diameter of 18 μm is also obtained. At the same time, algorithm has been designed to cooperate the move of the motorized stage and the acquisition of temperature data. It follow that the measruement of temperature distribution and the accurate location of the highest temperature region are realized.