Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range

Xudong Gao; Qingfeng Cui; Hanqing Zheng; Yang Hu; Lin Sun; Qi Wang

doi:10.3788/AOS202040.1722001

Journals >Acta Optica Sinica >Volume 40 >Issue 17 >Page 1722001 > Article

Acta Optica Sinica
Vol. 40, Issue 17, 1722001 (2020)

Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range

Xudong Gao, Qingfeng Cui^*, Hanqing Zheng, Yang Hu, Lin Sun, and Qi Wang

Author Affiliations

School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China

show less

DOI: 10.3788/AOS202040.1722001 Cite this Article Set citation alerts

Xudong Gao, Qingfeng Cui, Hanqing Zheng, Yang Hu, Lin Sun, Qi Wang. Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range[J]. Acta Optica Sinica, 2020, 40(17): 1722001 Copy Citation Text

show less

Fig. 1. Model of initial structure

Download full size

Fig. 2. Initial structure of deep ultraviolet optical system

Download full size

Fig. 3. MTF curves of optical system at different temperatures. (a) -60 ℃; (b) 20 ℃; (c) 100 ℃

Download full size

$Structure of refraction-diffraction hybrid deep ultraviolet optical system$

Fig. 4. Structure of refraction-diffraction hybrid deep ultraviolet optical system

Download full size

$MTF curves of refractive-diffraction hybrid optical systems at different temperatures. (a) -60 ℃;(b) 20 ℃; (c) 100 ℃$

Fig. 5. MTF curves of refractive-diffraction hybrid optical systems at different temperatures. (a) -60 ℃;(b) 20 ℃; (c) 100 ℃

Download full size

Fig. 6. Characteristic parameter curves of SLDOE

Download full size

$Diffraction efficiency of calcium fluoride crystals in the deep ultraviolet band. (a) Diffraction efficiency curves at different temperatures; (b) three-dimensional model of temperature, wavelength and diffraction efficiency$

Fig. 7. Diffraction efficiency of calcium fluoride crystals in the deep ultraviolet band. (a) Diffraction efficiency curves at different temperatures; (b) three-dimensional model of temperature, wavelength and diffraction efficiency

Download full size

Fig. 8. Estimated results of MTF

Download full size

Parameter	Value
wavelength range /nm	230--270
EFL /mm	110
F-number	3.5
FOV /(°)	±10
MTF	>0.65@18.5 lp/mm
temperature range /℃	-60--100
housing material	aluminum(23.6×10^-6 /℃)

Table 1. Parameters of system

Serialnumber	φ₁	φ₂	φ₃	Glass1	Glass2	Glass3	$\sum X_{TchC}$	$\sum X_{TC}$
1	1.51	-2.45	1.94	CAF2	F_SILICA	MGF2	-2.42×10^-4	-1.10×10^-4
2	1.60	-2.52	1.92	CAF2	F_SILICA	MGF2	-7.59×10^-4	-1.16×10^-4
3	1.73	-2.74	2.01	CAF2	F_SILICA	MGF2	-3.37×10^-3	-1.26×10^-4
4	1.80	-3.31	2.51	CAF2	F_SILICA	MGF2	-7.65×10^-3	-1.71×10^-4
5	-3.45	1.53	2.92	CAF2	F_SILICA	MGF2	3.23×10^-4	1.75×10^-4

Table 2. Partial solution parameters of lens group

Temperature /℃	Spotdiagram /μm	Encircledenergy /%
-60	12.675	81.194
-40	11.760	81.126
20	12.120	81.318
60	12.159	81.801
100	12.224	80.032

Table 3. Changes of system parameters with temperature after adiabatic difference

Parameter	Tolerancespecification
surface aperture	±2
thickness tolerance /mm	±0.05
X-eccentricity of lens element /mm	±0.05
Y-eccentricity of lens element /mm	±0.05
X-inclination of lens element	±3'
Y-inclination of lens element	±3'
X-eccentricity of lens surface /mm	±0.08
Y-eccentricity of lens surface /mm	±0.08
X-inclination of lens surface	±4.8'
Y-inclination of lens surface	±4.8'
surface irregularity tolerance	±0.5
refractive index tolerance	±1×10^-3

Table 4. Machining tolerance of the refraction-diffraction hybrid system

Xudong Gao, Qingfeng Cui, Hanqing Zheng, Yang Hu, Lin Sun, Qi Wang. Athermalization Design of Deep Ultraviolet Optical System with Wide Temperature Range[J]. Acta Optica Sinica, 2020, 40(17): 1722001

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information