Zhang Lu, Xiang Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 804008
- Chinese Journal of Lasers
- Vol. 45, Issue 8, 804008 (2018)
Fig. 1. Schematic of grating lateral shearing interferometer
Fig. 2. Interferogram acquired when tested lens is at different angular positions. (a) 0°; (b) 45°; (c) 90°; (d) 180°
Fig. 3. Wavefront aberrations of tested lens at different angular positions. (a) 0°; (b) 45°; (c) 90°; (d) 180°
Fig. 4. Wavefront aberrations at different angular positions after systemic errors are removed by 45° single-rotation algorithm[9]. (a) 0°; (b) 45°; (c) 90°; (d) 180°
Fig. 5. Wavefront aberrations at different angular positions after systemic errors are removed by error separation algorithm [12]. (a) 0°; (b) 45°; (c) 90°; (d) 180°
Fig. 6. Coefficients of the first 36-terms in Zernikepolynomial of systemic errors acquired by two algorithms
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Table 1. PV and RMS values of wavefront aberrations before and after systemic errors are removed
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