• Chinese Journal of Lasers
  • Vol. 45, Issue 8, 804008 (2018)
Zhang Lu1、2 and Xiang Yang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/CJL201845.0804008 Cite this Article Set citation alerts
    Zhang Lu, Xiang Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 804008 Copy Citation Text show less

    Abstract

    The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer, and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup. The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system. In addition, the RMS of the repeatability of the experimental data can approach 0.14 nm.
    Zhang Lu, Xiang Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 804008
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