Liangliang Yang, Chenglin Liu, Yongbing Zhao, Renjia Guo. Effect of Microstructure Height Error on Diffraction Efficiency at Oblique Incidence in a Certain Temperature Range[J]. Acta Optica Sinica, 2020, 40(4): 0405001
- Acta Optica Sinica
- Vol. 40, Issue 4, 0405001 (2020)
Fig. 1. Schematic diagram of microstructure heightchangescaused by temperature changes
Fig. 2. PIDE versus temperature at different relative microstructure height errors
Fig. 3. PIDE versus relative microstructure height error
Fig. 4. Diffraction efficiency versus incident angle within certain temperature range
Fig. 5. PIDE versus incident angle within certain temperature range
Fig. 6. Diffraction efficiency versus relative microstructure height error within certain temperature range
Fig. 7. PIDE versus relative microstructure height error within certain temperature range
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Table 1. Optimal relative microstructure height error corresponding to maximum diffraction efficiency
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Table 2. Optimal relative microstructure height error corresponding to maximum PIDE
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