MONOLITHIC INTEGRATION OF 256&#215;256 Si MICROLENS ARRAYS WITH INFRARED FOCAL PLANE ARRAYS

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Journal of Infrared and Millimeter Waves >Volume 20 >Issue 5 >Page 340 > Article

Journal of Infrared and Millimeter Waves
Vol. 20, Issue 5, 340 (2001)

MONOLITHIC INTEGRATION OF 256×256 Si MICROLENS ARRAYS WITH INFRARED FOCAL PLANE ARRAYS

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MONOLITHIC INTEGRATION OF 256×256 Si MICROLENS ARRAYS WITH INFRARED FOCAL PLANE ARRAYS[J]. Journal of Infrared and Millimeter Waves, 2001, 20(5): 340 Copy Citation Text

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Abstract

phase level 256×256 elements diffractive microlens arrays with element dimension of 30μm×40μm were fabricated on the backside of the PtSi infrared focal plane arrays (IRFPA) based on the scalar diffraction theory and computer aided design. The measurement results indicate that the ratio of the signal to noise of the PtSi IRFPA sample with microlenses is increased by a factor of 2.0.

Keywords

PtSi infrared focal plane arrays （PtSi IRFPA） mi

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