Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector

Qian LI; Ting HUANG; Wei-lin SHE; Dan WANG; Wei-rong XING

doi:10.3969/j.issn.1672-8785.2022.02.006

Journals >INFRARED >Volume 43 >Issue 2 >Page 34 > Article

INFRARED
Vol. 43, Issue 2, 34 (2022)

Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector

Qian LI, Ting HUANG, Wei-lin SHE, Dan WANG, and Wei-rong XING

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[in Chinese]

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DOI: 10.3969/j.issn.1672-8785.2022.02.006 Cite this Article

LI Qian, HUANG Ting, SHE Wei-lin, WANG Dan, XING Wei-rong. Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector[J]. INFRARED, 2022, 43(2): 34 Copy Citation Text

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References

[3] Kim C S, Ahn S H, Jang D Y. Review: Developments in micro/nanoscale fabrication by focused ion beams［J］. Vacuum, 2012, 86(8): 1014-1035.

LI Qian, HUANG Ting, SHE Wei-lin, WANG Dan, XING Wei-rong. Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector[J]. INFRARED, 2022, 43(2): 34

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