[3] Kim C S, Ahn S H, Jang D Y. Review: Developments in micro/nanoscale fabrication by focused ion beams[J]. Vacuum, 2012, 86(8): 1014-1035.
[3] Kim C S, Ahn S H, Jang D Y. Review: Developments in micro/nanoscale fabrication by focused ion beams[J]. Vacuum, 2012, 86(8): 1014-1035.
Set citation alerts for the article
Please enter your email address