Ruoqiu Wang, Zhiyu Zhang, Chengli Guo, Donglin Xue, Xuejun Zhang. Effects of fabrication errors on diffraction efficiency for a diffractive membrane[J]. Chinese Optics Letters, 2016, 14(12): 120501
- Chinese Optics Letters
- Vol. 14, Issue 12, 120501 (2016)
Fig. 1. Process flow for a 4-level master FZL fabrication.
Fig. 2. Process flow for a membrane FZL replication.
Fig. 3. Schematic of an on-substrate prefixing fixture.
Fig. 4. Phase distribution of a 4-level diffractive element.
Fig. 5. (a) Phase distribution of a 4-level element with etching depth errors, and (b) relationship between etching depth errors and diffraction efficiency.
Fig. 6. (a) Phase distribution of a 4-level element with overlay registration errors, and (b) relationship between overlay registration errors and diffraction efficiency.
Fig. 7. (a) Phase distribution of a 4-level element with linewidth errors, and (b) relationship between linewidth errors and diffraction efficiency.
Fig. 8. Phase distribution of a 4-level membrane FZL with width transfer errors.
Fig. 9. Phase distribution of a 4-level membrane FZL with depth transfer errors.
Fig. 10. Relationship between transfer errors and diffraction efficiency.
Fig. 11. Photo of 4-step level membrane FZL.
Fig. 12. (a)–(b) Micrographs of two observations in 200 ×
Fig. 13. (a) Linewidths on membrane and (b) test result of each step depth on the membrane.
Fig. 14. Distribution map of different diffractive orders.
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Table 1. Experimental Data of Diffraction Efficiency
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