[1] BELLEVILLE P F, PREN P, LAMBERT B. UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT[C]. SPIE, 2000, 3943: 67-71.
[2] LIU Xiao-lin, ZHANG Wei-qing, TANG Yong-xing, et al. Preparation of silica antireflective coatings by raise process[J]. Acta Photonic Sinica, 1998, 27(1): 29-33.
[3] WANG Yong-qiang, HU Xiao-yun, MIAO Zhong-hai, et al. Reflection reducing coatings composed of TiO2-SiO2 multilayer films prepared using sol-gel processing[J]. Acta Photonic Sinica, 2008, 37(6): 1165-1168.
[4] GUO Y J, ZU X T, JIANG X D, et al. Laser-induced damage mechanism of sol-gel single-layer SiO2 acid and base thin films[J]. Nuclcear Instruments and Methods in Physical Research Section B: Beam Ineractions with Materials and Atoms, 2008, 266(12-13): 3190-3194.
[5] THOMAS I M, BURNHAM A K, ERTEL J R, et al. Method for reducing the effect of environmental contamination of sol-gel optical coatings[C]. SPIE, 1999, 3492: 220-229.
[6] MACKENZIE J D, BESCHER E P. Physical properties of sol-gel coatings[J]. Journal of Sol-Gel Science and Technology, 2000, 19(1-3): 23-29.
[7] WANG W T, LU N, HAO J Y, et al. Self-assembled monolayer islands masked chemical etching for broad-band antireflective silicon surfaces[J]. Journal of Physical Chemistry C, 2010, 114(5): 1989-1995.
[8] JEONG H J, KIM D K, LEE S B, et al. Preparation of water-repellent glass by sol-gel process using perfluoroalkylsilane and tetraethoxysilane[J]. Journal of Colloid and Interface Science, 2001, 235(1): 130- 134.
[9] WU Guang-ming, SHEN Jun, WANG Yu, et al. Strengthening investigation of antireflective nano-porous silica films derived by base/acid two-step sol-gel process and mixed atmosphere treatment[J]. Atomic Energy Science and Technology, 2002, 36(4-5): 374- 379.
[10] GURAV A B, LATTHE S S, KAPPENSTEIN C, et al. Porous water repellent silica coatings on glass by sol–gel method[J]. Journal of Porous Materials, 2011, 18(3): 361- 367.
[11] WANG Juan, ZHANG Chang-rui, FENG Jian. Modification of Nanoporous silica film by Trimethylchlorosilane[J]. Atca Physico-Chimica Sinica, 2004, 20(12): 1399- 1403.
[12] ZHANG Yu-lu, ZHANG Xin-xiang, YE Hai-ping, et al. Design, preparation and modification of third-harmonic silica antireflective coatings with different thickness[J]. Chinese Journal of Inorganic Chemistry, 2012, 28(1): 119- 124.
[13] BELLEVILLE P F, FLOCH H G. Ammonia-hardening of porous silica antireflective coatings[C]. SPIE, 1994, 2288: 25- 32.
[15] ZHANG X X, YE H P, XIAO B, et al. Sol-Gel preparation of PDMS/silica hybrid antireflective coatings with controlled thickness and durable antireflective performance[J]. Journal of Physical Chemistry C, 2010, 114(47): 19979- 19983.
[16] HENCH L L, WEST J K. The sol-gel process[J]. Chemical Reviews, 1990, 90(1): 33- 72.