HUO Yan-fang, LUO Rong-hui, SU Yong-gang. Comparison of Base-catalyzed Silica Antireflective Coatings Modified by Different Surface Treatments of Water-NH3 and/or Hexamethyldisilazane Vapors[J]. Acta Photonica Sinica, 2013, 42(7): 823
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