Fig. 1. Structure component of fast steering mirror
Fig. 2. Structure of flexible support
Fig. 3. Structure and force diagram of flexible hinge
Fig. 4. Voice coil motor driving and load model
Fig. 5. Open loop control diagram of fast steering mirror
Fig. 6. Frequency response characteristics of the output force of voice coil motor to the position of mirror
Fig. 7. Open-loop frequency response characteristics
Fig. 8. Frequency response characteristics of closed loop control system
Fig. 9. Step response of closed loop control system
Fig. 10. Finite element analysis result of swing part
Fig. 11. Frequency response characteristic of motion axis
Fig. 12. Control signal
Fig. 13. Kinematics model of swing parts
Fig. 14. Output angle signal of mirror
Index | Parameter | Size | Φ100 mm×7 mm
| Angle range | ±10 mrad | Closed-loop bandwidth | 200 Hz | Positioning accuracy | 5 μrad |
|
Table 1. Design index of fast steering mirror
Parts | Name of material | Density/
kg∙mm−3 | Young's modulus/GPa | Poisson
rate
| Mirror | Aluminium alloy | 2.7e−6 | 71 | 0.33 | Flexible support | Titanium alloy | 4.48e−6 | 110 | 0.34 | Coil stator | Copper | 8.9e−6 | 8.9e−6 | 0.37 | Mirror frame | Aluminium alloy | 2.68e−6 | 69 | 0.33 |
|
Table 2. Material properties of swing parts
Total mass/kg | Moment of inertia ofx axis/kg∙mm−2 | Moment of inertia ofy axis/kg∙mm−2 | 0.388 | 489.091 | 489.091 |
|
Table 3. Mass properties of swing part of fast steering mirror
Performance parameter | Symbol | Value | Unit | Direct current resistance | R | 3.7 | Ω | Inductance | L | 1.0 | mH | Back potential constant | ke | 3.5 | V/m·s−1 | Force constant | kf | 8.9 | N/A
| Sustained thrust | Fc | 16.3 | N | Peak thrust | Fp | 44 | N | Total travel | S | ±2 | mm | Coil side clearance | Cl | 0.4 | mm | Coil assembly weight | mc | 45 | g | Magnetic steel component weight | mf | 225 | g |
|
Table 4. Performance parameters of voice coil motor
Structure name | Symbol | Value | Unit | Cutting radius | R | 3 | mm | Thickness | t | 1 | mm | Width | b | 7 | mm |
|
Table 5. Structure parameters of flexible hinge