[1] WANG Ru-dong, TIAN Wei, WANG Ping, et al. Effect of temperature change on the surface accuracy of bonded lens[J]. Chinese Journal of Lasers, 2011, 38(8): 0808002.
[3] TRUNZ M, HILGERS R, MERZ E, et al. Optical imaging device, particularly an objective, with at least one optical element: US, 6191898[P], 2001.
[4] HALE L C. Precision tip-tilt-piston actuator that provides exact constraint: US, 5986827[P], 1999.
[8] HALE L C. Principles and techniques for designing precision machines[D], California, University of California, 1999.
[9] OSHINO T, SHIRAISHI M, KANDAKA N, et al. Development of illumination optics and projection optics for high-NA EUV exposure tool (HiNA)[C]. SPIE, 2003, 5037: 75-82.
[10] PENG Hai-feng, SUN Zhen. Design and analysis of a precision axial adjusting mechanism for optical elements in lithographic lens[J]. Acta Photonica Sinica, 2014, 43(4): 0422005.
[12] ZHANG De-fu, LI Xian-ling. Effect of adjusting force on surface figure of lens in eccentric adjusting mechanism[J]. Chinese Journal of Lasers, 2014, 41(7):0716004.
[14] YODER P R. Opto-mechanical systems design [M]. 3rd ed, Florida: CRC Press, 2006.
[15] LI Y M, XU Q S. Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator[J]. IEEE Transactions on Robotics, 2009, 25(3): 645-657.
[16] LI Y M, HUANG J M, TANG H. A compliant parallel XY micromotion stage with complete kinematic decoupling [J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(3): 538-553.