ZHANG De-fu, LI Xian-ling, DONG Li-jian, SUN Zhen. Coupling Error Inhibition of Eccentric Adjustment Mechanism Design in Lithographic Objective Lens[J]. Acta Photonica Sinica, 2015, 44(9): 922001

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- Acta Photonica Sinica
- Vol. 44, Issue 9, 922001 (2015)
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