• Infrared and Laser Engineering
  • Vol. 32, Issue 4, 335 (2003)
[in Chinese]*, [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Twyman-Green infrared phase-shifting interferometer and application[J]. Infrared and Laser Engineering, 2003, 32(4): 335 Copy Citation Text show less
    References

    [1] Kwon O,Wyant J C , Hayslett C R. Rough surface interferometry at 10.6μm[J]. Applied Optics,1980, 19(11): 1863-1869.

    [2] Verma K, Han B. Warpage measurement on dielectric rough surfaces of micoelectronics devices by far infrared fizeau interferometry[J]. Journal of Electronic Package,2000,122:227-232.

    [3] Kaushal Verma, Bongtea Han.Far-infrared fizeau interferometry[J]. Applied Optics,2001,40(28): 4891-4897.

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    [2] Zhang Yu, Jin Chunshui, Ma Dongmei, Wang Liping. Key technology for fiber phase-shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2015, 44(1): 254

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Twyman-Green infrared phase-shifting interferometer and application[J]. Infrared and Laser Engineering, 2003, 32(4): 335
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