Surface Measurement Using Compressed Wavefront Sensing

Eddy Mun; Ningqun GUO; Edwin CHONG; Xin WANG

doi:10.1007/s13320-018-0521-x

[1] D. C. Yuan, H. Y. Zhao, X. Tao, S. B. Li, X. L. Zhu, and C. P. Zhang, “Aspheric surface measurement using capacitive sensors,” Sensors, 2017, 17(6): 1355-1.1355-16.

[2] Y. Zhao, P. S. Li, C. S. Wang, and Z. B. Pu, “A novel fiber-optic sensor used for small internal curved surface measurement,” Sensors and Actuators A: Physical, 2000, 86(3): 211.215.

[3] Y. D. Li and P. Gu, “Free-form surface inspection techniques state of the art review,” Computer-Aided Design, 2004, 36(13): 1395.1417.

[4] X. Jiang, P. J. Scott, D. J. Whitehouse, and L. Blunt, “Paradigm shifts in surface metrology. part II. the current shift,” Proceedings of the Royal Society A: Mathematical, Physical and Engineering Science, 2007, 463(2085): 2071.2099.

[5] J. Riedel, S. Stürwald, and R. Schmitt, “Scanning measurement of aspheres,” Measurement, 2016, 85: 249.254.

[6] Y. Tang, X. Y. Su, Y. K. Liu, and H. L. Jing, “3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry,” Optics Express, 2008, 16(19): 15090.15096.

[7] J. H. Burge, “Applications of computer-generated holograms for interferometric measurement of large aspheric optics,” SPIE, 1995, 2576: 258-269.

[8] C. R. Forest, C. R. Canizares, D. R. Neal, M. McGuirk, and M. L. Schattenburg, “Metrology of thin transparent optics using Shack-Hartmann wavefront sensing,” Optical Engineering, 2004, 43: 1.12.

[9] B. C. Platt and R. Shack, “History and principles of Shack-Hartmann wavefront sensing,” Journal of Refractive Surgery, 2001, 17(5): S573-S577.

[10] H. B. Yu, G. Y. Zhou, S. C. Fook, F. W. Lee, and S. H. Wang, “A tunable Shack-Hartmann wavefront sensor based on a liquid-filled microlens array,” Journal of Micromechanics and Microengineering, 2008, 18(10): 105017-1.105017-8.

[11] G. H.usler, C. Richter, K. H. Leitz, and M. C. Knauer, “Microdeflectometry.a novel tool to acquire three-dimensional microtopography with nanometer height resolution,” Optics Letters, 2008, 33(4): 396.398.

[12] W. Guo, L. Zhao, C. S. Tong, C. I. Ming, and S. C. Joshi, “Adaptive centroid-finding algorithm for freeform surface measurements,” Applied Optics, 2013, 52(10): D75.D83.

[13] X. M. Yin, L. P. Zhao, X. Li, and Z. P. Fang, “Automatic centroid detection and surface measurement with a digital Shack-Hartmann wavefront sensor,” Measurement Science and Technology, 2010, 21(1): 015304-1.015304-17.

[14] L. Zhao, N. Bai, X. Li, L. S. Ong, Z. P. Fang, and A. K. Asundi, “Efficient implementation of a spatial light modulator as a diffractive optical microlens array in a digital Shack-Hartmann wavefront sensor,” Applied Optics, 2006, 45(1): 90.94.

[15] D. L. Donoho, “Compressed sensing,” IEEE Transactions on Information Theory, 2006, 52(4): 1289.1306.

[16] M. S. Hosseini and O. V. Michailovich, “Derivative compressive sampling with application to phase unwrapping,” in Proceeding of 2009 17th European Signal Processing Conference, Glasgow, UK, 2009, pp. 115.119.

[17] M. Rostami, O. V. Michailovich, and Z. Wang, “Surface reconstruction in gradient-field domain using compressed sensing,” IEEE Transactions on Image Processing, 2015, 24(5): 1628.1638.

[18] M. Rostami, O. Michailovich, and Z. Wang, “Image deblurring using derivative compressed sensing for optical imaging application,” IEEE Transactions on Image Processing, 2012, 21(7): 3139.3149.

[19] R. J. Noll, “Zernike polynomials and atmospheric turbulence,” Journal of the Optical Society of America, 1976, 66(3): 207.211.

[20] N. A. Roddier, “Atmospheric wavefront simulation using Zernike polynomials,” 1990, 29(7): 1174.1180.

[21] J. Polans, R. P. McNabb, J. A. Izatt, and S. Farsiu, “Compressed wavefront sensing,” Optics Letters, 2014, 39(5): 1189.1192.

[22] Y. Carmon and E. Ribak, “Phase retrieval by demodulation of a Hartmann-Shack sensor,” Optics Communications, 2003, 215(4.6): 285.288.

[23] H. Gong, O. Soloviev, M. Verhegen, and G. Vdovin, “Shack-Hartmann reflective micro profilometer,” SPIE, 2018, 10616: 106160M-1-106160M-7.

[24] E. Sakhaee and A. Entezari, “Sparse partial “Gradient-based surface reconstruction using derivatives and reconstruction from partial Fourier compressed sensing,” in Proceeding of 2012 19th data,” in Proceeding of 2016 IEEE International IEEE International Conference on Image Processing, Conference on Acoustics, Speech and Signal Orlando, FL, USA, 2012, pp. 913.916. Processing, Brisbane, QLD, Australia, 2015, pp.

[25] G. M. Dai, “Modified Hartmann-Shack wavefront 3621.3625. sensing and iterative wavefront reconstruction,”

[26] M. Rostami, O. Michailovich, and Z. Wang, SPIE, 1994, 2201: 562.573.