INVESTIGATION ON Pb(Zr0.3Ti0.7)O3 PYROELECTRIC THIN FILM MATERIALS

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

[1] Yamakawa K, Trolier-McKinstry S, Dougherty J P. Preparation of lead zirconate titanate thin films by reactive magnetron co-sputtering [J]. Materials Letters, 1996, 28: 317-322.

[2] Suyal G, Setter N. Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity [J]. Journal of the European Ceramic Society, 2004, 24: 247-281.

[3] Vélu G, Rèmiens G. Electrical properties of sputtered PZT films on stabilized platinum electrode [J]. Journal of the European Ceramic Society, 1999, 19: 2005-2013.

[4] Bouregba R, Poullain G, Vilquin B, et al. Orientation control of textured PZT thin films sputtered on silicon substrate with TiOx seeding [J]. Materials Research Bulletin, 2000, 35: 1381-1390.

[5] Chang C C, Tang C S. Preparation and properties of lead-zirconate-titanate ferroelectric thin films using radio frequency planar magnetron sputtering [J]. Journal of applied physics, 2000, 87: 3931-3936.

[7] Al-Shareef H N, Bellur K R, Auciello O. Phase evolution and annealing effects on the electrical properties of Pb(Zr0.53Ti0.47)O3 thin films with RuO2 electrodes [J]. Thin Solid Films, 1995, 256: 73-79.

[8] Ko J S, Liu W G, Zhu W G. Substrate effects on the properties of the pyroelectric thin film IR detectors [J]. Sensors and Actuators A, 2001, 93: 117-122.

[9] Okamura S, Abe N, Otani Y, et al. Influence of Pt/TiO2 bottom electrodes on the properties of ferroelectric Pb(Zr,Ti)O3 thin films [J]. Integrated Ferroelectrics, 2003, 52: 127-136.

[10] Roeder J F, Chen I-S, Van Buskirk P C, et al. Dielectric and pyroelectric properties of thin film PZT [J]. IEEE International Symposium on Applications of Ferroelectrics, 1998,8: 217-220.

[11] Kurogi H, Yamagata Y, Ebihara K, et al. Preparation of PZT thin films on YBCO electrodes by KrF excimer laser ablation technique [J]. Surface and Coatings Technology, 1998, 100-101: 424-427.

[12] Yang C T, Liu J S, Zhang S R, et al. Characterization of Pb(Zr,Ti)O3 thin film prepared by pulsed laser deposition [J]. Materials Science and Engineering, 2003, B99: 356-359.

[13] Bao D H, Yao X, Shinozaki K, et al. Growth and electrical properties of Pb(Zr,Ti)O3 thin films by a chemical solution deposition method using zirconyl heptanoate as zirconium source [J]. Journal of Crystal Growth, 2003, 259: 352-357.

[14] Kim S H, Park D Y, Woo H J, et al. Orientation effects in chemical solution derived Pb(Zr0.3,Ti0.7)O3 thin films on ferroelectric properties [J]. Thin Solid Films, 2002, 416: 264-270.

[15] Okamura S, Abe N, Otani Y, et al. Influence of Pt/TiO2 bottom electrodes on the properties of ferroelectric Pb(Zr,Ti)O3 thin films [J]. Integrated Ferroelectrics, 2003,52: 127-136.

[16] Lee J Y, Lee B S. Orientation control and electrical properties of sputtered Pb(Zr,Ti)O3 films [J]. Materials Science and Engineering, 2001, B79: 86-89.

CLP Journals