[1] K. Otaki, Y Zhua, M. Ishij et al.. Rigorous wave front analysis of the visible-light point diffraction interferometer for EUVL[C]. SPIE, 2004, 5193: 182~190
[2] K. Otaki, T. Yamamoto, Y. Fukuda et al.. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror[J]. J. Vac. Sci. Technol. B, 2002, 20(1): 295~300
[3] H. Medecki, E. Tejnil, K. A. Goldberg et al.. Phase-shifting point diffraction interferometer[J]. Opt. Lett., 1996, 21(19): 1526~1528
[4] Y. Ichbara. Interferometer[P]. U. S. Patent 5076695, 1991-12-31
[5] G. E. Sommargren. Phase shifting interferometer[P]. U. S. Patent 5933236, 1999-08-03
[6] P. P. Naulleau, K. A. Goldberg, S. H. Lee et al.. Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy[J]. Appl. Opt., 1999, 38(35): 7252~7263
[7] K. Otaki, F. Bonneau, Y. Ichihara. Absolute measurement of spherical surface by point diffraction interferometer[C]. SPIE, 1999, 3740: 602~605
[8] K. Ota, T. Yamamoto, Y. Fukuda et al.. Advanced point diffraction interferometer for EUV aspherical mirrors[C]. SPIE, 2001, 4343: 543~550
[9] K. Ota, T. Yamamoto, Y. Fukuda et al.. Aspherical mirror measurement using a point diffraction interferometer[C]. SPIE, 2002, 4688: 690~694
[10] K. A. Goldberg, P. Naulleau, S. H. Lee et al.. Direct comparison of EUV and visible-light interferometries[C]. SPIE, 1999, 3676: 1~8
[12] Y. Sekine, A. Suzuki, M. Hasegawa. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B, 2004, 22(1): 104~108
[13] Chen Chen, Yang Yongying, Wang Daodang et al.. Analysis of point-diffraction wavefront error based on finite difference time domain method[J]. Chinese J. Lasers, 2011, 38(9): 0908003
[15] A. Wong. Rigorous Three-Dimensional Time-Domain Finite-Difference Electromagnetic Simulation[D]. California: University of California at Berkeley,1994. 11~25
[16] J. W. Goodman. Introduction to Fourier Optics[M]. Qing Kechneg, Liu Peisen, Chen Jiabi et al. Transl.. Beijing: Publishing House of Industry Press, 2006. 40~42
[17] D. Malacara, J. M. Carpio-Valadéz. J. J. Sánchez-Mondragón. Wavefront fitting with discrete orthogonal polynomials in a unit radius circle[J]. Opt. Engng., 1990, 29(6): 672~675
[18] D. J. Fischer, J. T. O′Bryan, R. Lopez. Vector formulation for interferogram surface fitting[J]. Appl. Opt., 1993, 32(25): 4738~4743
[19] C. P. Brophy. Effect of intensity error correlation on the computed phase of phase-shifting interferometry[J]. J. Opt. Soc. Am. A, 1990, 7(4): 537~541
[20] Bing Zhao, Y. Surrel. Effect of quantization error on the computed phase of phase-shifting measurements[J]. Appl. Opt., 1997, 36(10): 2070~2075