Xiaowei YANG, Weifang YUAN, Tonghui LI, Yu LI, Xiaowen DONG, Kai LIU, Yongqing HUANG, Xiaofeng DUAN. Design and Fabrication of Integrated Microlens for High Speed Photodetectors[J]. Acta Photonica Sinica, 2023, 52(8): 0823001
- Acta Photonica Sinica
- Vol. 52, Issue 8, 0823001 (2023)
Fig. 1. Schematic of an integrated microlens device
Fig. 2. Light field diagram of collimated incident light passing through a microlens
Fig. 3. Light field diagram of diverging incident light passing through a microlens
Fig. 4. Schematic of the process of photoresist hot melt
Fig. 5. Light microscope image of colloidal Au plating
Fig. 6. SEM image of colloidal Au plating
Fig. 7. Microlens heights at different chamber pressures
Fig. 8. Microlens heights with different Ar flows
Fig. 9. Etching time of microlens with different RF power
Fig. 10. SEM images of integrated microlenses
Fig. 11. Test picture of light detector responsivity
Fig. 12. Normalized responsivity under different reverse bias
Fig. 13. Normalized responsiveness at different locations
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