Jinze Liu, Yongqiang Pan, Da Zhang, Yanzheng Fan. Surface Roughness and Scattering Characteristics of TiO2 Thin Film[J]. Laser & Optoelectronics Progress, 2020, 57(3): 033101
- Laser & Optoelectronics Progress
- Vol. 57, Issue 3, 033101 (2020)
Fig. 1. Geometrical relationship of light scattering
Fig. 2. Curves of XBRDFcosθs changed with different scattering angles under different film surface roughnesses
Fig. 3. Surface characteristics of TiO2 thin films at different deposition rates. (a) Relationship between surface roughness and deposition rate; (b) curves of surface scattering and scattering angle under different surface roughnesses
Fig. 4. Surface characteristics of TiO2 thin films at different deposition angles. (a) Relationship between surface roughness and incident deposition angle; (b) curves of surface scattering and scattering angle under different surface roughnesses
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