A Fast Method for Calculating the Thermal Effect in Projection Objective Lenses

Luo Cong; Gong Yan

doi:10.3788/aos201434.0712003

[1] T Matsuyama, Y Ohmura, D M Williamson. The lithographic lens: its history and evolution [C]. SPIE, 2011, 6154: 615403.

[2] M van de Kerkhof, E van Setten, A Engelen, et al.. Imaging performance optimization for hyper-NA scanner systems in high volume production [C]. SPIE, 2008, 6924: 69241W.

[3] S Halle, M Crouse, A Jiang, et al.. Lens heating challenges for negative tone develop layers with freeform illumination a comparative study of experimental versus simulated results [C]. SPIE, 2012, 8326: 832607.

[4] Chen Xu′nan, Yu Guobin, Zhang Jin. A constant-temperature water jacket of sub-micron lithography objective lens, China: 00223787.3[P]. 2001-05-30.

[5] T Nakashima, Y Ohmura, T Ogata, et al.. Thermal aberration control in projection lens [C]. SPIE, 2008, 6924: 69241V.

[6] Y Uehara, T Matsuyama, T Nakashima, et al.. Thermal aberration control for low k1 lithography [C]. SPIE, 2007, 6520: 65202V.

[7] F Staals, A Andryzhyieuskaya, H Bakker, et al... Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner [C]. SPIE, 2011, 7973: 79731G.

[8] J Lim, K Kang, S Kim, et al.. Advanced scanner matching using freeform source and lens manipulators [C]. SPIE, 2011, 7973: 79732A.

[9] J Bekaert, L VanLook, G Vandenberghe, et al.. Characterization and control of dynamical lens heating effects under high volume manufacturing conditions [C]. SPIE, 2011, 7973: 79730V.

[10] P Liu, M Snajdr, Z Zhang, et al.. A computational method for optimal application specific lens control in microlithography [C]. SPIE, 2010, 7640: 76400M.

[11] Y Ohmura, T Ogata, T Hirayama, et al.. An aberration control of projection optics for multi-patterning lithography [C]. SPIE, 2011, 7973: 79730W.

[12] Qin Shuo, Gong Yan, Yuan Wenquan. High precision temperature control for projection lens with long time thermal response constant [J]. Optics and Precision Engineering, 2013, 21(1): 108-114.

[13] Yang Shiming, Tao Wenquan. Heat Transfer[M]. Beijing: Higher Education Press, 2006. 7-8.

[14] Chen Xu, Yuan Wenquan, Feng Yutao, et al.. Study of the error of the reference lens in absolute spherical testing and the thermal deformation model establishment [J]. Acta Optica Sinica, 2011, 31(2): 0212002.