Discharge characteristics of XeCl excimer laser with high repetition rate

Wang Husheng; Ni Jinzhi; Wang Jianye; Li Guangyin; Yu Yinshan

Journals >Acta Optica Sinica >Volume 9 >Issue 10 >Page 871 > Article

Acta Optica Sinica
Vol. 9, Issue 10, 871 (1989)

Discharge characteristics of XeCl excimer laser with high repetition rate

Wang Husheng, Ni Jinzhi, Wang Jianye, Li Guangyin, and Yu Yinshan

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[in Chinese]

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Wang Husheng, Ni Jinzhi, Wang Jianye, Li Guangyin, Yu Yinshan. Discharge characteristics of XeCl excimer laser with high repetition rate[J]. Acta Optica Sinica, 1989, 9(10): 871 Copy Citation Text

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Abstract

The discharge characteristics of XeCl excimer laser using UV preionization discharge pump with high repetition rate are described. Influnee of discharge parameters on discharge process are analyzed. The transfer efficiency maxmum hag reached 2.2%.

Keywords

efficiency properties excimer laser high repetition rate power properties

Wang Husheng, Ni Jinzhi, Wang Jianye, Li Guangyin, Yu Yinshan. Discharge characteristics of XeCl excimer laser with high repetition rate[J]. Acta Optica Sinica, 1989, 9(10): 871

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