Design of hybrid refractive-diffractive f-θ lens working on CO2 laser drilling system

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 35 >Issue 3 >Page 351 > Article

Infrared and Laser Engineering
Vol. 35, Issue 3, 351 (2006)

Design of hybrid refractive-diffractive f-θ lens working on CO2 laser drilling system

[in Chinese]^1、*, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design of hybrid refractive-diffractive f-θ lens working on CO2 laser drilling system[J]. Infrared and Laser Engineering, 2006, 35(3): 351 Copy Citation Text

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References

[2] EHRMANN J S.Optics for vector scanning[C]// Proceedings of SPIE,1991,1454:245-255.

[3] WHITMAN T L,ARAGHI M N.Electronic f-theta correction for hologon deflector systems[C]//Proceedings of SPIE,1991,1454:426-433.

[4] TAKASHI A,HIDEAKI I,KOJI Y,et al.Development of f-θ lens for CO2 laser drilling system[J].SEI Technical Review,2000,49:135-141.

[7] MISSING M D,MORRIS G M.Diffractive optics applied to eyepiece design[J].Appl Opt,1995,34:2452-2461.

[8] KEIJI F,TAKESHI O,KEIJI E.Diffractive/refractive hybrid f-θ lens for laser drilling of multilayer printed circuit boards[C]//Proceedings of SPIE,2002,4830:95-100.

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