• Laser & Optoelectronics Progress
  • Vol. 59, Issue 15, 1516019 (2022)
Xiaohan Yu1、2, Dongfeng Qi1、*, Wenju Zhou3, Mengxia Chen3, Xiang Shen3, Shixun Dai3, and Hongyu Zheng1、**
Author Affiliations
  • 1School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, Shandong , China
  • 2State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3Laboratory of Infrared Materials and Devices, Ningbo University, Ningbo 315211, Zhejiang , China
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    DOI: 10.3788/LOP202259.1516019 Cite this Article Set citation alerts
    Xiaohan Yu, Dongfeng Qi, Wenju Zhou, Mengxia Chen, Xiang Shen, Shixun Dai, Hongyu Zheng. Fabrication of Periodic Nanostructures on the Surface of Chalcogenide Glass using Ultrafast Laser[J]. Laser & Optoelectronics Progress, 2022, 59(15): 1516019 Copy Citation Text show less
    References

    [1] Zou L E, He P P, Chen B X et al. Nonlinear optical properties of As20S80 system chalcogenide glass using Z-scan and its strip waveguide under bandgap light using the self-phase modulation[J]. AIP Advances, 7, 025003(2017).

    [2] Choi J W, Han Z H, Sohn B U et al. Nonlinear characterization of GeSbS chalcogenide glass waveguides[J]. Scientific Reports, 6, 39234(2016).

    [3] Wu G L, Feng Z, Wang J et al. Fabrication and optical properties of a novel seven-core high-NA chalcogenide glass fiber based on extrusion[J]. Acta Optica Sinica, 41, 1006003(2021).

    [4] Fu X H, Wang H F, Zhang J et al. Development of infrared antireflection coating for molded chalcogenide glass elements[J]. Acta Optica Sinica, 41, 2031003(2021).

    [5] Liu Y Y, Liao M S, Wang X et al. Mid-infrared spectroscopy of novel Er3+ doped indium modified chalcogenide glasses[J]. Journal of Luminescence, 187, 1-8(2017).

    [6] Cha D H, Kim H J, Hwang Y et al. Fabrication of molded chalcogenide-glass lens for thermal imaging applications[J]. Applied Optics, 51, 5649-5656(2012).

    [7] Zhang H, Guo H T, Xu Y T et al. Research progress in chalcogenide glass fibers for infrared laser delivery[J]. Chinese Journal of Lasers, 49, 0101007(2022).

    [8] Taniguchi J, Tokano Y, Miyamoto I et al. Preparation of diamond mold using electron beam lithography for application to nanoimprint lithography[J]. Japanese Journal of Applied Physics, 39, 7070-7074(2000).

    [9] Däschner W, Long P, Stein R et al. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass[J]. Applied Optics, 36, 4675-4680(1997).

    [10] Vieu C, Carcenac F, Pépin A et al. Electron beam lithography: resolution limits and applications[J]. Applied Surface Science, 164, 111-117(2000).

    [11] Apel P. Track etching technique in membrane technology[J]. Radiation Measurements, 34, 559-566(2001).

    [12] Montelius L, Heidari B, Graczyk M et al. Nanoimprint- and UV-lithography: Mix & Match process for fabrication of interdigitated nanobiosensors[J]. Microelectronic Engineering, 53, 521-524(2000).

    [13] Kawamura K, Ogawa T, Sarukura N et al. Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses[J]. Applied Physics B, 71, 119-121(2000).

    [14] Wang Y M, Guan Y C. Progress in preparation of medical functional surfaces by femtosecond laser-induced micro/nanostructures[J]. Chinese Journal of Lasers, 49, 1002601(2022).

    [15] Cho S H, Kumagai H, Midorikawa K et al. Fabrication of double cladding structure in optical multimode fibers using plasma channeling excited by a high-intensity femtosecond laser[J]. Optics Communications, 168, 287-295(1999).

    [16] Kondo Y, Nouchi K, Mitsuyu T et al. Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses[J]. Optics Letters, 24, 646-648(1999).

    [17] Wang T Y, Bian J T, Li X et al. Effect of laser induced periodic surface structures on infrared emission characteristics of copper films[J]. Chinese Journal of Lasers, 48, 0401017(2021).

    [18] Buividas R, Mikutis M, Juodkazis S. Surface and bulk structuring of materials by ripples with long and short laser pulses: recent advances[J]. Progress in Quantum Electronics, 38, 119-156(2014).

    [19] Wang L P, Zhao M J, Qiu J L et al. Metal organic framework-derived cobalt dicarboxylate as a high-capacity anode material for lithium-ion batteries[J]. Energy Technology, 5, 637-642(2016).

    [20] Richter S, Heinrich M, Döring S et al. Nanogratings in fused silica: formation, control, and applications[J]. Journal of Laser Applications, 24, 042008(2012).

    [21] Liang F, Vallée R, Chin S L. Mechanism of nanograting formation on the surface of fused silica[J]. Optics Express, 20, 4389-4396(2012).

    [22] Bonse J, Rosenfeld A, Krüger J. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses[J]. Journal of Applied Physics, 106, 104910(2009).

    [23] Shimotsuma Y, Kazansky P G, Qiu J R et al. Self-organized nanogratings in glass irradiated by ultrashort light pulses[J]. Physical Review Letters, 91, 247405(2003).

    [24] Zhou G S, Fauchet P M, Siegman A E. Growth of spontaneous periodic surface structures on solids during laser illumination[J]. Physical Review B, 26, 5366-5381(1982).

    [25] Höhm S, Rosenfeld A, Krüger J et al. Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica[J]. Applied Physics Letters, 102, 054102(2013).

    [26] Song J, Ye J Y, Lin X et al. Discussion of the possible formation mechanism of near-wavelength ripples on silicon induced by femtosecond laser[J]. Applied Physics A, 118, 1119-1125(2015).

    [27] Sipe J E, Young J F, Preston J S et al. Laser-induced periodic surface structure. I. Theory[J]. Physical Review B, 27, 1141-1154(1983).

    [28] Lin C G, Rüssel C, Dai S X. Chalcogenide glass-ceramics: functional design and crystallization mechanism[J]. Progress in Materials Science, 93, 1-44(2018).

    Xiaohan Yu, Dongfeng Qi, Wenju Zhou, Mengxia Chen, Xiang Shen, Shixun Dai, Hongyu Zheng. Fabrication of Periodic Nanostructures on the Surface of Chalcogenide Glass using Ultrafast Laser[J]. Laser & Optoelectronics Progress, 2022, 59(15): 1516019
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