Tao HUANG, Zhihong LUO, Guibao TAO, Mingxiang LING. Hammerstein modeling and feedback linearization control for piezoelectric positioning stage[J]. Optics and Precision Engineering, 2022, 30(14): 1716
- Optics and Precision Engineering
- Vol. 30, Issue 14, 1716 (2022)
Fig. 1. Piezoelectric positioning stage
Fig. 2. Hysteresis curves of piezoelectric positioning stage
Fig. 3. Structure of Hammerstein model
Fig. 4. Block diagram of input-output feedback linearization control strategy
Fig. 5. Experimental setup
Fig. 6. Model verification of 10 Hz， 50 Hz and 100 Hz
Fig. 7. Tracking control results of 10 Hz， 50 Hz and 100 Hz
Fig. 8. Tracking control of composite signal
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Table 1. Parameters of Hammerstein model
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Table 2. Model error
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Table 3. Root mean square errors of three control methods
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