Xiaoran Li, Yiwen Chen, Mojie Xie, Jiaoling Zhao. Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range[J]. Acta Optica Sinica, 2023, 43(19): 1936001
- Acta Optica Sinica
- Vol. 43, Issue 19, 1936001 (2023)
Fig. 1. A sample of 50 nm-thin freestanding Si filter: a flat surface without folding
Fig. 2. Measurement results of thickness. (a) XRR measurement and fitting curves of Si thin film; (b) cross-section SEM image of Si filter
Fig. 3. Measured transmission values and theoretical calculation values ("cal.1") for 50 nm-thin freestanding Si filter in 10-20 nm band, where a transmission value as high as 86.02% was measured at 13.5 nm
Fig. 4. XPS measurement results of Si filter. (a) XPS full spectra on surface of filter; (b) distribution of atomic percentage during deep etching
Fig. 5. Measured transmission values and theoretical calculation values for 50 nm-thin freestanding Si filter in 10-20 nm band after optimization of calculation model ("cal.2")
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Table 1. XRR fitting results of Si thin film
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Table 2. Measurement results of film-thickness uniformity
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Table 3. Comparison of two models used in IMD calculation
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