All-Dielectric Metasurface Sensor Based on Fano Resonance

Xu Zhang; Benlei Zhao; Bo Wu; Hancheng Zhang; Hai Liu

doi:10.3788/LOP202259.1728001

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 17 >Page 1728001 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 17, 1728001 (2022)

All-Dielectric Metasurface Sensor Based on Fano Resonance

Xu Zhang^1、2, Benlei Zhao^1、2, Bo Wu^1、2, Hancheng Zhang^1、2, and Hai Liu^1、2、*

Author Affiliations

¹The Engineering Research Center of Intelligent Control for Underground Space, Ministry of Education, China University of Mining and Technology, Xuzhou 221116, Jiangsu , China

²School of Information and Control Engineering, China University of Mining and Technology, Xuzhou 221116, Jiangsu , China

show less

DOI: 10.3788/LOP202259.1728001 Cite this Article Set citation alerts

Xu Zhang, Benlei Zhao, Bo Wu, Hancheng Zhang, Hai Liu. All-Dielectric Metasurface Sensor Based on Fano Resonance[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1728001 Copy Citation Text

show less

Abstract

In this paper, a symmetrical all-dielectric metasurface structure is designed to achieve a high-sensitivity dual-parameter sensor. After coating a gas-sensitive thin film on the metasurface, two Fano resonance peaks labeled as dip 1 and dip 2 are generated to measure the refractive index and gas volume fraction simultaneously. The calculation results show that the refractive index and gas volume fraction sensitivity of dip 1 are 1035 nm/RIU and -0.57 nm/%, respectively, and the refractive index sensitivity and gas volume fraction sensitivity of dip 2 are 543.6 nm/RIU and -0.87 nm/%, respectively. The sensor can be used for high-sensitivity measurement of two parameters, and the transmission spectrum obtained using the symmetrical structure is not affected by the polarization angle of the light source, improving the adaptability of the sensor to the light source, and it provides a new method for detecting the environment.

Keywords

Fano resonance metasurface polarization-independent sensors

\begin{array}{l} I = \frac{2 ω^{4}}{3 c^{3}} | P |^{2} + \frac{2 ω^{4}}{3 c^{3}} | M |^{2} + \frac{4 ω^{5}}{3 c^{4}} (P \cdot T) + \frac{2 ω^{6}}{3 c^{5}} | T |^{2} + \\ \frac{ω^{6}}{5 c^{5}} \sum {|Q_{α, β}^{(e)}|}^{2} + \frac{ω^{6}}{40 c^{5}} \sum {|Q_{α, β}^{(m)}|}^{2} + O (\frac{1}{c^{5}}) \end{array}

，（1）

P = \frac{1}{i ω} \int j d^{3} r

，（2）

M = \frac{1}{2 c} \int r \times j d^{3} r

，（3）

T = \frac{1}{10 c} \int [(d \cdot j) r - 2 r^{2} j] d^{3} r

，（4）

Q_{α, β}^{(e)} = \frac{1}{i 2 ω} \int [r_{α} j_{β} + j_{β} r_{α} - \frac{2}{3} (r \cdot j) δ_{α, β}] d^{3} r

，（5）

Q_{α, β}^{(m)} = \frac{1}{3 c} \int [{(r \times j)}_{α} r_{β} + ({(r \times j)}_{β^{r} α})] d^{3} r

，（6）

T_{F a n o} = |a_{1} + i a_{2} + \frac{b}{ω - ω_{0} + i γ}|

，（7）

S = d λ / d n

，（8）

N_{e f f} = 1.4478 - 0.0038 C_{C H_{4}}

，（9）

\{\begin{matrix} Δ λ_{1} = S_{I 1} \times Δ X_{R I} + S_{C 1} \times Δ C \\ Δ λ_{2} = S_{I 2} \times Δ X_{R I} + S_{C 2} \times Δ C \end{matrix}

，（10）

S = |\begin{matrix} S_{I 1} & S_{C 1} \\ S_{I 2} & S_{C 2} \end{matrix}|

，（11）

[\begin{matrix} Δ λ_{1} \\ Δ λ_{2} \end{matrix}] = S • [\begin{matrix} Δ X_{R I} \\ Δ C \end{matrix}]

，（12）

[\begin{matrix} Δ X_{R I} \\ Δ C \end{matrix}] = S^{- 1} • [\begin{matrix} Δ λ_{1} \\ Δ λ_{2} \end{matrix}]

。（13）

[\begin{matrix} Δ X_{R I} \\ Δ C \end{matrix}] = {[\begin{matrix} 1035 n m / R I U & - 0.57 n m / 1 % \\ 543.6 n m / R I U & - 0.87 n m / 1 % \end{matrix}]}^{- 1} \cdot [\begin{matrix} Δ λ_{1} \\ Δ λ_{2} \end{matrix}]

。（14）

Xu Zhang, Benlei Zhao, Bo Wu, Hancheng Zhang, Hai Liu. All-Dielectric Metasurface Sensor Based on Fano Resonance[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1728001

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information