An Easily Blowing and Highly Reliable Silicided Polysilicon Fuse Trimming Circuit

ZHANG Lin; LI Jing; FU Dongbing; WAN Xianjie; DING Yi

doi:10.13911/j.cnki.1004-3365.200353

Journals >Microelectronics >Volume 51 >Issue 2 >Page 221 > Article

Microelectronics
Vol. 51, Issue 2, 221 (2021)

An Easily Blowing and Highly Reliable Silicided Polysilicon Fuse Trimming Circuit

ZHANG Lin, LI Jing, FU Dongbing, WAN Xianjie, and DING Yi

Author Affiliations

[in Chinese]

show less

DOI: 10.13911/j.cnki.1004-3365.200353 Cite this Article

ZHANG Lin, LI Jing, FU Dongbing, WAN Xianjie, DING Yi. An Easily Blowing and Highly Reliable Silicided Polysilicon Fuse Trimming Circuit[J]. Microelectronics, 2021, 51(2): 221 Copy Citation Text

show less

References

[2] DOORN T S, ALTHEIMER M. Ultra-fast programming of silicided polysilicon fuses based on new insights in the programming physics ［C］ ∥ IEEE IEDM. Washington D C, USA. 2005: 667-670.

[3] WONG C C, CHANG S P, TU H F, et al. Performance enhancement of high-current-injected electrically programmable fuse with compressive-stress nitride layer ［J］. IEEE Elec Dev Lett, 2014, 35(3): 297-299.

[5] DOORN T S. A detailed qualitative model for the programming physics of silicided polysilicon fuses ［J］. IEEE Trans Elec Dev, 2007, 54(12): 3285-3291.

[6] LEE W T, FLOWER A C, POWER O, et al. Blowing of polycrystalline silicon fuses ［J］. Appl Phys Lett, 2010, 97(2): 023502.

ZHANG Lin, LI Jing, FU Dongbing, WAN Xianjie, DING Yi. An Easily Blowing and Highly Reliable Silicided Polysilicon Fuse Trimming Circuit[J]. Microelectronics, 2021, 51(2): 221

Download Citation

Tools

Save the article for my favorites

Paper Information