Yuan Su, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Kexin Ren, Yuwen Zhang. Measurement Method of Aspherical Synchronous Annular Subaperture Interferometry[J]. Acta Optica Sinica, 2024, 44(8): 0826001
- Acta Optica Sinica
- Vol. 44, Issue 8, 0826001 (2024)
Fig. 1. Schematic of SASI method to detect aspherical surface
Fig. 2. Lightpath diagram of aspherical surface test using SASI method
Fig. 3. Lightpath model of aspheric test using SASI method
Fig. 4. Simulated interferograms and changing rate curves of OPD. (a) Simulated interferogram by interferometer; (b) changing rate of OPD measured by interferometer; (c) simulated interferogram by SASI method; (d) changing rate of OPD measured by SASI method
Fig. 5. Measurement data before and after unifying the reference standard. (a) Before unifying the reference standard; (b) after unifying the reference standard
Fig. 6. Actual surface error and aspherical surface error and residual measured by SASI method. (a) Actual surface error; (b) surface error measured by SASI method; (c) surface residual by SASI method
Fig. 7. Schematic of actual measuring system
Fig. 8. Collected interferograms in the experiment. (a) Aspherical surface measuring by interferometer; (b) aspherical surface measuring by SASI method
Fig. 9. Testing results of aspheric surface. (a) Testing result by SASI method; (b) testing result by Luphoshcan method; (c) residual between test results of SASI and Luphoscan methods
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Table 1. Distance between two focuses of bifocal lens and corresponding detection area parameters
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Table 2. Bifocal lens design parameters and corresponding detection area parameters
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Table 3. Results of SASI and Luphoshcan methods and the PV and RMS values of surface error
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