• Laser & Optoelectronics Progress
  • Vol. 53, Issue 11, 111203 (2016)
Zhang Hao1、2、*, Yan Feng1, Wei Haisong1、2, Chen Xindong1, and Cheng Qiang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/lop53.111203 Cite this Article Set citation alerts
    Zhang Hao, Yan Feng, Wei Haisong, Chen Xindong, Cheng Qiang. Error Analysis of Scanning Hartmann Wavefront Testing Technique[J]. Laser & Optoelectronics Progress, 2016, 53(11): 111203 Copy Citation Text show less

    Abstract

    Based on the surface shape reconstruction algorithm for slope detection in combination with the calibration results of the guideway pointing errors, the influence of the sources of these errors on the actual test results is analyzed and the corresponding numerical simulation and compensation are conducted for the theoretical analysis. The results show that the wavefront testing technique method based on the scanning Hartmann principle is not sensitive to the high-frequency errors, and the wavefront testing accuracy can be improved by fitting to the low-frequency errors. This finding has an important guiding significance in the engineering application of wavefront testing technique.
    Zhang Hao, Yan Feng, Wei Haisong, Chen Xindong, Cheng Qiang. Error Analysis of Scanning Hartmann Wavefront Testing Technique[J]. Laser & Optoelectronics Progress, 2016, 53(11): 111203
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