Xiaoyan Li, Yongfu Wen, Haobo Cheng, Hengyu Wu, Huaying Wang. Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism[J]. Acta Optica Sinica, 2019, 39(4): 0412013
- Acta Optica Sinica
- Vol. 39, Issue 4, 0412013 (2019)
Fig. 1. Optical path of FTP measurement system
Fig. 2. Schematic of common optical path interference
Fig. 3. Coordinate analysis of common optical path interference
Fig. 4. Interference patterns. (a) Simulated interference fringe when θ=3.55°; (b) simulated interference fringe when θ=3.57°; (c) simulated interference fringe when θ=3.58°; (d) actual interference fringe when θ=2°; (e) actual interference fringe when θ=3°
Fig. 5. Physical diagram of experimental equipment
Fig. 6. Object to be measured. (a) Physical object and deformed fringe pattern; (b) phase unwrapping pattern
Fig. 7. Phase distribution maps of the same row of each calibration plane at different positions. (a) Before unwrapping; (b) after unwrapping
Fig. 8. Calibration results of measurement system. (a) Parameter a; (b) parameter b
Fig. 9. Experiment results. (a) Three coordinate machine measurement chart; (b) three-dimensional topography of object; (c) error distribution map
Fig. 10. Calibration plane 9 error analysis. (a) Fringe pattern; (b) fringe pattern in line 300; (c) Fourier spectrum; (d) phase unwrapping pattern
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