The technical characteristics, instrument composition, application fields and working scope of X-ray fluorescence (XRF)and micro-X-ray fluorescence analysis (MXRF)are briefly described. The development of micro-X-ray fluorescence instruments and analytical techniques in China is reviewed from four aspects: collimated microbeam X-ray fluorescence instrument, integrated X-ray fluorescence and micro-X-ray fluorescence instrument, micro-X-ray fluorescence function in multifunctional (spectrum/energy spectrum) instrument and capillary X-ray convergent lens micro-X-ray fluorescence instrument. Finally, the development of micro-X-ray fluorescence technology has prospected from two aspects of functional positioning and technological development. It is proposed that the traditional in-situ microanalysis can be further divided into “μ-n(area)-analysis(μ-XRF)” and “sub-mm-cm(area)-analysis(MXRF)”. This kind of technical distinction and application scope positioning is beneficial to the development of in-situ microanalysis technology, and also provides a clear positioning for the development and application of integrated/micro-zone combination instruments. The author also emphasizes that in-situ microanalysis is not a simple analytical problem, but more importantly, the study of the properties of the tested materials and the reasonable interpretation of the results. Close cooperation between analytical technicians and professional scientists can give full explain to the effectiveness of in-situ analytical techniques and analyze the scientific significance of analytical results in detail.