• Laser & Optoelectronics Progress
  • Vol. 60, Issue 23, 2312001 (2023)
Guang Zhou1,3, Weizheng Lei2, Xiaohao Dong1,2,*, and Jie Wang1,2
Author Affiliations
  • 1Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/LOP222992 Cite this Article Set citation alerts
    Guang Zhou, Weizheng Lei, Xiaohao Dong, Jie Wang. Absolute Measurement of Rectangular Flat Mirrors Using a Unidirectional Multi-Shifted Method[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2312001 Copy Citation Text show less
    Schematic diagram of pixel-level translation 2D absolute measurement
    Fig. 1. Schematic diagram of pixel-level translation 2D absolute measurement
    Fitted plane. (a) Reference circular plane REF; (b) measured rectangular plane SUT; (c) relative measurement result M
    Fig. 2. Fitted plane. (a) Reference circular plane REF; (b) measured rectangular plane SUT; (c) relative measurement result M
    Effect of random noise on one-dimensional absolute measurement
    Fig. 3. Effect of random noise on one-dimensional absolute measurement
    Surface contrast without noise. (a) Original plane; (b) rectangular plane after recovery; (c) residual map
    Fig. 4. Surface contrast without noise. (a) Original plane; (b) rectangular plane after recovery; (c) residual map
    Surface contrast with random noise. (a) Original plane; (b) rectangular plane after recovery; (c) residual map
    Fig. 5. Surface contrast with random noise. (a) Original plane; (b) rectangular plane after recovery; (c) residual map
    Effect of different translation times on surface shape with random noise
    Fig. 6. Effect of different translation times on surface shape with random noise
    Effect of shift pixel on surface shape recovery
    Fig. 7. Effect of shift pixel on surface shape recovery
    Experimental setup
    Fig. 8. Experimental setup
    Rectangular plane mirror measurement interface
    Fig. 9. Rectangular plane mirror measurement interface
    Surface contrast. (a) Original plane; (b) rectangular absolute plane after recovery; (c) residual map
    Fig. 10. Surface contrast. (a) Original plane; (b) rectangular absolute plane after recovery; (c) residual map
    Centerline contrast
    Fig. 11. Centerline contrast
    Final surface contrast. (a) Original plane; (b) rectangular absolute plane after recovery; (c) residual map
    Fig. 12. Final surface contrast. (a) Original plane; (b) rectangular absolute plane after recovery; (c) residual map
    Pixel size12345681012152024304060
    No noise0.0330.0340.0350.0360.0380.0400.0450.0500.0570.0670.0900.1130.1630.3121.001
    Noise0.2100.2830.3250.3690.3970.4170.4780.5110.5500.5810.6440.6880.7300.8241.276
    Table 1. Surface residual RMS for recovery with different pixel sizes
    Guang Zhou, Weizheng Lei, Xiaohao Dong, Jie Wang. Absolute Measurement of Rectangular Flat Mirrors Using a Unidirectional Multi-Shifted Method[J]. Laser & Optoelectronics Progress, 2023, 60(23): 2312001
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