• Acta Optica Sinica
  • Vol. 26, Issue 2, 202 (2006)
[in Chinese]1、*, [in Chinese]2, [in Chinese]3, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Testing of Dynamic Characteristics of a Micro-Machined Vibratory Gyroscope[J]. Acta Optica Sinica, 2006, 26(2): 202 Copy Citation Text show less
    References

    [1] Andrel M. Shkel. Micromachined gyroscope: Challenges, design solutions, and opportunities[C]. Proc. SPIE, 2001, 4334: 74~85

    [2] V. Annovazzi-Lodi, S. Merlo, M. Norgia. Measurements on a micromachined silicon gyroscope by feedback interferometry[J]. IEEE/ASME Transactions on Mechatronics, 2001, 6(1): 1~6

    [4] Y. Mochida, M. Tamura, K. Ohwada. A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes[J]. Sens. Actuators, 2000, 80(2): 170~178

    [5] Rong Ming Lin, Zhe Wang, Koh Wah Leow et al.. Design and simulation of a novel micromachined vibratory gyroscope with enhanced sensitivity performance[C]. Proc. SPIE, 2001, 4593: 72~81

    [9] K. Tanaka, Y. Mochida, M. Sugimoto et al.. A micromachined vibrating gyroscope[J]. Sens. Actuators (A), 1995, 50(1~2): 111~115

    [11] K. Maenaka, T. Fujita, Y. Konishi et al.. Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass[J]. Sens. Actuators A, 1996, 54(1~3): 568~573

    [12] S. H. Choa. Reliability of vacuum packaged MEMS gyroscopes[J]. Microelectronics Reliability, 2005, 45(2): 361~369

    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Optical Testing of Dynamic Characteristics of a Micro-Machined Vibratory Gyroscope[J]. Acta Optica Sinica, 2006, 26(2): 202
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