Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering

Kun Chen; Huanfeng Zhu; Xinyu Yi; Shuai Cheng; Jing Li; Songyou Wang; Ming Lu; Min Xu; Li Ma; Lei Lü

doi:10.3788/COL201513.103101

Journals >Chinese Optics Letters >Volume 13 >Issue 10 >Page 103101 > Article

Chinese Optics Letters
Vol. 13, Issue 10, 103101 (2015)

Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering

Kun Chen¹, Huanfeng Zhu¹, Xinyu Yi¹, Shuai Cheng¹, Jing Li^1、2、*, Songyou Wang^1、2, Ming Lu^1、2, Min Xu^1、2, Li Ma³, and Lei Lü⁴

Author Affiliations

¹Department of Optical Science and Engineering, Fudan University, Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Shanghai 200433, China

²Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Shanghai 200433, China

³College of Physical Science and Engineering, Tongji University, Shanghai 200092, China

⁴Department of Medical Physics, Weifang Medical University, Shandong 261053, China

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DOI: 10.3788/COL201513.103101 Cite this Article Set citation alerts

Kun Chen, Huanfeng Zhu, Xinyu Yi, Shuai Cheng, Jing Li, Songyou Wang, Ming Lu, Min Xu, Li Ma, Lei Lü. Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering[J]. Chinese Optics Letters, 2015, 13(10): 103101 Copy Citation Text

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Abstract

A number of zinc oxide (ZnO) films are deposited on silicon substrates using the magnetron sputtering method. After undergoing thermal treatment under different conditions, those films exhibit hexagonal wurtzite structures and different photoluminescent characteristics. Besides the notable ultraviolet emission, which is related to the free exciton effect, a distinct blue fluorescence around 475 nm is found in some special samples. The blue photoluminescence emission of the ZnO film is believed to be caused by oxygen vacancies.